235 21SFDJTJPO 2%PWFUBJM 4UBHF DPNQBSJTPO 5FDIOJDBM 4VQQPSUFE 1SPEVDUT $PTU &GGJDJFOU 1SPEVDUT Manual Positioning Stages 2 1SFDJTJPO 9 "YJT %PWFUBJM 0 5 10 10 5 0 6-M2, Depth 5 2-M2, Depth 4 4-Ø2.5 Through Ø4.2 Counterbore, Depth 2.5 Feed Knob 7 25 20 10 15 10 8 Clamp (M2x3.5) Ø6 11.5 20 23 25 10 10 6.7 Ø12 7 20 15 0 10 10 0 0 10 10 0 6-M3 Depth 5 2-M3, Depth 4 Feed Knob 5-M2, Depth 4 7 Ø12 32 15 40 28 20 20 8 16 16 23 20 16 16 40 6.7 4-Ø3.5 Through Ø6 Counterbore, Depth 3.5 7 32 Clamp (M2x3.5) 11.5 Ø6 0 10 0 10 0 10 10 20 20 0 60 20 8 25 25 32 39.5 60 25 32 25 11.8 8-M4, Depth 6 4-M3, Depth 6 10.5 Ø10 50 20 7 Feed Knob Ø12 6.6 50 17 Clamp (M3x4) 4-Ø4.5 Through Ø8 Counterbore, Depth 4.5 9&( 9&( 9&( 91( . Material: (Main Body) Low Cadmium Brass (Feed Knob) Aluminum 4 Surface Treatment: Black Fluororesin Treatment 1BSU /VNCFS 4UBHF 4VSGBDF NN 5SBWFM %JTUBODF NN 5SBWFM QFS 3PUBUJPO NN -PBE $BQBDJUZ / 5SBWFM "DDVSBDZ N .PNFOU -PBE $BQBDJUZ / t N 1BSBMMFMJTN 8FJHIU LH "DDFTTPSZ 5ZQF /P )PSJ[POUBM 7FSUJDBM 4USBJHIUOFTT 1BSBMMFMJTN 1JUDIJOH :BXJOH 3PMMJOH 5ZQF . - 2VBOUJUZ 9&( 25x25 ±5 0.5 29.4 9.8 30 30 2.0 1.5 1.3 40μm 0.07 SCB2-8 4 40x40 ±7 4.0 3.0 3.0 0.19 SCB3-6 60x60 ±9 39.2 19.6 5.0 4.0 4.0 0.60 SCB4-6 1BSU OVNCFS XEG60 XFES60 (VJEF Dovetail slide Dovetail slide 5IJDLOFTT 17mm 17mm 5PQ GBDF TJ[F 60 X 60 mm 60 X 60 mm 1SFDJTJPO High Precision Stage Standard Precision Stage 5SBWFM "DDVSBDZ 4USBJHIUOFTT 30μm 50μm 4USPLF ±9mm ±8mm TYPE CODE : 9&( &For more variation, see P60 (Index by function) TYPE CODE : 91( " 4UBHF 4VSGBDF NN -PBE $BQBDJUZ / 5SBWFM "DDVSBDZ .PNFOU -PBE $BQBDJUZ /tN .PNFOU 3JHJEJUZ /tDN 1BSBMMFMJTN 8FJHIU LH "DDFTTPSZ QDT )PSJ[POUBM 7FSUJDBM 4USBJHIUOFTT .PUJPO 1BSBMMFMJTN 1JUDIJOH :BXJOH 1JUDIJOH :BXJOH 3PMMJOH 1JUDIJOH :BXJOH 3PMMJOH 5ZQF. - 25x25 9.8 4.9 3μm 10μm 30" 30" 1.1 0.8 0.4 3.03 2.85 1.80 30μm 0.04 SCB2-6 40x40 19.6 9.8 25" 15" 2.7 2.2 2.0 0.38 0.42 0.28 0.14 SCB3-6 60x60 49.0 19.6 5.2 4.3 5.5 0.12 0.11 0.07 0.25 SCB4-6 80x80 98.0 49.0 19.2 15.1 17.3 0.05 0.05 0.04 0.50 SCB4-6 100x100 147.0 36.0 30.0 33.0 0.06 0.07 0.05 0.70 SCB4-6 120x120 196.0 50" 30" 57.2 44.7 66.7 0.03 0.02 0.01 1.60 SCB4-10 K A A J E F Q X G X T1 T (B) P D Clamp (M3x5) (M2x3.5 for A=25) 4-d1 Through d2 Counterbore, Depth M R1SFDJTJPO 9 "YJT $SPTTFE SPMMFS
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