Vacuum Pad, Standard Small Type, VPMA, One Touch Fitting Type

A small vacuum pad that is optimally suited for use in semiconductor manufacturing facilities. *The CAD data for this Series is being revised. This data will be made available as soon as the modifications have been completed.

[Features]
· Different pad types are available. These include a general type that is suited for flat work (non-flimsy/thick type work), a deep type that is suited for spherical fruits (apples, etc.) and balls, and a small type that is suited for small work and use inside semiconductor manufacturing facilities.
· This fitting is offered in a wide range of pad sizes, pad materials, and holder shapes.
· Pad holders have been added for applications that require the use of non-copper based metals and measures against low-concentration ozone.
· No copper-based metals are used in the metal component materials. HNBR is utilized for the rubber sealing material.

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Product specification
Part Numbers
Catalog

A Small Vacuum Pad Ideal For Use In Semiconductor Manufacturing Facilities

Pad material
Nitrile rubber, silicone rubber, urethane rubber, fluorine rubber, conductive silicone rubber, conductive butadiene rubber (low-resistance type), conductive NBR (low-resistance type), Food Sanitation Law-compliant NBR, HNBR, EPDM
Pad size
: Ø0.7 (diameter 0.7 mm), Ø1 (diameter 1 mm), Ø1.5 (diameter 1.5 mm), Ø2 (diameter 2 mm), Ø3 (diameter 3 mm), Ø4 (diameter 4 mm), Ø6 (diameter 6 mm), Ø8 (diameter 8 mm), Ø10 (diameter 10 mm), Ø15 (diameter 15 mm), Ø20 (diameter 20 mm), Ø25 (diameter 25 mm), Ø30 (diameter 30 mm), Ø40 (diameter 40 mm), Ø50 (diameter 50 mm), Ø60 (diameter 60 mm), Ø80 (diameter 80 mm), Ø100 (diameter 100 mm), Ø150 (diameter 150 mm), Ø200 (diameter 200 mm)

*Static electricity-diffusing rubber and conductive rubber (low-resistance type) and Food Sanitation Law-compliant NBR are Ø1 to 50 (diameter 1 to 50 mm).

Fixed Type

	Vacuum Outlet, Upper		Vacuum Outlet, Horizontal		Direct Attachment
Type	Standard	Small	Standard	Small	Standard	Small
Symbol	VPA	VPMA	VPB	VPMB	VPE	VPME

Spring Type

	Vacuum Outlet, Upper		Vacuum Outlet, Horizontal		Direct Attachment
Type	Standard	Small	Standard	Small	Standard
Symbol	VPC	VPMC	VPD	VPMD	VPF

Coupling size

Single-action Coupling (mm)	Ø1.8, Ø3, Ø4, Ø6
Barbed Coupling (Applicable Tube Outer Diameter × Inner Diameter) (mm)	Ø1.8 × Ø1, Ø3 × Ø2, Ø4 × Ø2.5, Ø6 × Ø4

Screw size
Flat female screws for pipes: Rp (G) 1/8, Rp s(G) 1/4

Standard shape for thick and flat workpieces. Deep shape ideal for round fruit (apples, etc.), bowls, etc.

Small pads can be used with semiconductor parts

Small holders downsized from existing vacuum pad holders (A, B, C, D and E types) to save space.
Also compatible with the optional fall prevention valve and directly attachable-type pad filters.

The pad can be changed without detaching the holder from the equipment.
Pad holders compatible with applications requiring no copper-based metal use and low concentration ozone measures are available.
No copper-based metals are used in the metal component materials, and HNBR is used for the rubber sealing material.

*Pad material: Nitrile, conductive rubber (low resistance type) and Food Sanitation Law-compliant NBR are not suitable for low-concentration ozone measures.

Data to be displayed: 30; 45; 60

Part Number
VPMA0.7RMS-3J
VPMA0.7RMS-180J
VPMA0.7RMSE-3J
VPMA0.7RMSE-180J
VPMA1RMS-3J
VPMA1RMS-180J
VPMA1RMSE-3J
VPMA1RMSE-180J
VPMA1.5RMS-3J
VPMA1.5RMS-180J
VPMA1.5RMSE-3J
VPMA1.5RMSE-180J
VPMA2RMS-3J
VPMA2RMS-180J
VPMA2RMSE-3J
VPMA2RMSE-180J
VPMA3RMS-3J
VPMA3RMS-180J
VPMA3RMSE-3J
VPMA3RMSE-180J
VPMA4RMS-3J
VPMA4RMS-180J
VPMA4RMSE-3J
VPMA4RMSE-180J
VPMA6RS-3J
VPMA6RS-180J
VPMA6RSE-3J
VPMA6RSE-180J
VPMA8RS-3J
VPMA8RS-180J
VPMA8RSE-3J
VPMA8RSE-180J
VPMA10RS-3J
VPMA10RS-4J
VPMA10RSE-3J
VPMA10RSE-4J
VPMA15AS-3J
VPMA15AS-4J
VPMA15RS-3J
VPMA15RS-4J
VPMA15RSE-3J
VPMA15RSE-4J
VPMA20AS-4J
VPMA20RS-4J
VPMA20RSE-4J
VPMA25AS-4J
VPMA25RS-4J
VPMA25RSE-4J
VPMA30AS-4J
VPMA30RS-4J
VPMA30RSE-4J

Standard Unit Price	Minimum order quantity	Standard Shipping Days ?	Pad Type	Mounting Method	Rubber Group Material	Usage Environment	Color	Outer Diameter D (φ)	Height L1 (mm)	Full length B (mm)	Mount Connection Screw	Vacuum Outlet Tube Outer Diameter (φ)
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	0.7	4	20.5	M5	3
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	0.7	4	19.9	M5	1.8
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	0.7	4	20.5	M5	3
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	0.7	4	19.9	M5	1.8
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	1	4	20.5	M5	3
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	1	4	19.9	M5	1.8
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	1	4	20.5	M5	3
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	1	4	19.9	M5	1.8
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	1.5	4	20.5	M5	3
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	1.5	4	19.9	M5	1.8
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	1.5	4	20.5	M5	3
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	1.5	4	19.9	M5	1.8
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	2	4	20.5	M5	3
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	2	4	19.9	M5	1.8
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	2	4	20.5	M5	3
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	2	4	19.9	M5	1.8
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	3	4	20.5	M5	3
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	3	4	19.9	M5	1.8
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	3	4	20.5	M5	3
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	3	4	19.9	M5	1.8
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	4	4	20.5	M5	3
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	4	4	19.9	M5	1.8
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	4	4	20.5	M5	3
13.76 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	4	4	19.9	M5	1.8
14.21 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	6	7	21.7	M8	3
14.21 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	6	7	21.1	M6	1.8
14.21 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	6	7	21.7	M8	3
14.21 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	6	7	21.1	M6	1.8
14.21 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	8	5.5	20.2	M8	3
14.21 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	8	5.5	19.6	M6	1.8
14.21 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	8	5.5	20.2	M8	3
14.21 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	8	5.5	19.6	M6	1.8
16.32 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	10	8	24.7	M8	3
16.32 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	10	8	28.7	M10	4
16.32 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	10	8	24.7	M8	3
16.32 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	10	8	28.7	M10	4
16.78 €	1	10 Days	Deep Type	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	15	10	26.7	M8	3
16.78 €	1	10 Days	Deep Type	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	15	10	30.7	M10	4
16.78 €	1	11 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	15	9	25.7	M8	3
16.78 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	15	9	29.7	M10	4
16.78 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	15	9	25.7	M8	3
16.78 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	15	9	29.7	M10	4
18.15 €	1	10 Days	Deep Type	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	20	11	33.3	M10	4
18.15 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	20	10	32.3	M10	4
18.60 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	20	10	32.3	M10	4
18.15 €	1	10 Days	Deep Type	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	25	12	34.3	M10	4
18.15 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	25	11	33.3	M10	4
19.05 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	25	11	33.3	M10	4
18.60 €	1	10 Days	Deep Type	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	30	14	36.3	M10	4
18.60 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	30	11	33.3	M10	4
22.08 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	30	11	33.3	M10	4

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Basic information

Pad type	Standard / Holder Set	Material	Rubber-Based	Mounting Bracket	Fixed Type
Vacuum Outlet Direction	Top	Fall Prevention Valve	None	Direct Attached Filter	None
Metal parts material	Standard Specifications

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Basic Attributes

Pad Type
- Deep Type
- Compact
Clear
Mounting Method
- Recessed Type
- Pad Screw Fixed
Clear
Usage Environment
- Standard
- Static electricity diffusion
Clear
Color
- Black
- Gray
- White
  - White
- Blue
Clear
Outer Diameter D(φ)
0.7

1

1.5

2

3

4

6

8

10

15

20

25

30
Clear
Height L1(mm)
4

5.5

7

8

9

10

11

12

14
Clear
Full length B(mm)
19.6

19.9

20.2

20.5

21.1

21.7

24.7

25.7

26.7

28.7

29.7

30.7

32.3

33.3

34.3

36.3
Clear
Mount Connection Screw
- M5
- M6
- M8
- M10
Clear
Vacuum Outlet Tube Outer Diameter(φ)
- 1.8
- 3
- 4
Clear
Type
- VPMA
Clear
Rubber Group Material
- Nitrile Rubber
  - Nitrile Rubber
- NBR which conforms to Food Sanitation Law
- Silicone Rubber
  - Silicone Rubber
  - Silicone Rubber +Carbon
- Urethane Rubber
- Fluorine Rubber
Clear
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