Vacuum Pad Standard Small Type VPMB One Touch Fitting Type (Part Numbers - CAD Download)

Small vacuum pad ideal for use in semiconductor manufacturing equipment, *CAD data currently being revised for this series. This will be available as soon as modifications are complete.

Part Number

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Product specification
Part Numbers
Catalog

Dimensions

Standard table

Model code	Tube O.D. øD	Pad O.D. ød	B	L	Tube end C	E	Connection config. code
VPMB0.7RM[5]-180J	1.8	0.7	15	4	8.4	12	-T4
VPMB0.7RM[5]-4J[9]	4	0.7			10.9	15
VPMB1RM[5]-180J	1.8	1			8.4	12
VPMB1RM[5]-4J[9]	4	1			10.9	15
VPMB1.5RM[5]-180J	1.8	1.5			8.4	12
VPMB1.5RM[5]-4J[9]	4	1.5			10.9	15
VPMB2RM[5]-180J	1.8	2			8.4	12
VPMB2RM[5]-4J[9]	4	2			10.9	15
VPMB3RM[5]-180J	1.8	3			8.4	12
VPMB3RM[5]-4J[9]	4	3			10.9	15
VPMB4RM[5]-180J	1.8	4			8.4	12
VPMB4RM[5]-4J[9]	4	4			10.9	15
VPMB6R[5]-180J	1.8	6	19.5	7	8.4	12.5	-T8
VPMB6RM[5]-4J[9]	4	6	19.5	7	10.9	15.5
VPMB8R[5]-180J	1.8	8	18	5.5	8.4	12.5
VPMB8RM[5]-4J[9]	4	8	18	5.5	10.9	15.5
VPMB10R[5]-180J	1.8	10	27	8	8.4	13.7	-M4
VPMB10R[5]-4J[9]	4	10	27	8	10.9	17.5
VPMB15R(A)[5]-180J	1.8	15	28(29)	9(10)	8.4	13.7
VPMB15R(A)[5]-4J[9]	4	15	28(29)	9(10)	10.9	17.5
VPMB20R(A)[5]-180J	1.8	20	31.2(32.2)	10(11)	8.4	13.7	-M6
VPMB20R(A)[5]-4J[9]	4	20	31.2(32.2)	10(11)	10.9	17.5
VPMB25R(A)[5]-180J	1.8	25	32.2(33.2)	11(12)	8.4	13.7
VPMB25R(A)[5]-4J[9]	4	25	32.2(33.2)	11(12)	10.9	17.5
VPMB30R(A)[5]-180J	1.8	30	32.2(35.2)	11(14)	8.4	13.7
VPMB30R(A)[5]-4J[9]	4	30	32.2(35.2)	11(14)	10.9	17.5
VPMB40R(A)[5]-180J	1.8	40	35.2(38.7)	14(17.5)	8.4	13.7
VPMB40R(A)[5]-4J[9]	4	40	35.2(38.7)	14(17.5)	10.9	17.5
VPMB50R(A)[5]-180J	1.8	50	36.2(39.2)	15(18)	8.4	13.7
VPMB50R(A)[5]-4J[9]	4	50	36.2(39.2)	15(18)	10.9	17.5

Units: mm

*Value in ( ) is the dimension of a deep type pad.
*[5]: Replaced with Pad rubber material code. Refer to the catalog for details.
*[9]: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts).
*Pad material N, NE, and G are not suitable for use under ozone environment.

Data to be displayed: 30; 45; 60

Part Number
VPMB4RMF-3J
VPMB4RMF-180J
VPMB4RMG-3J
VPMB4RMG-180J
VPMB4RMN-3J
VPMB4RMN-180J
VPMB4RMS-3J
VPMB4RMS-180J
VPMB4RMSE-3J
VPMB4RMSE-180J
VPMB4RMU-3J
VPMB4RMU-180J
VPMB6RF-3J
VPMB6RF-180J
VPMB6RG-3J
VPMB6RG-180J
VPMB6RN-3J
VPMB6RN-180J
VPMB6RS-3J
VPMB6RS-180J
VPMB6RSE-3J
VPMB6RSE-180J
VPMB6RU-3J
VPMB6RU-180J
VPMB8RF-3J
VPMB8RF-180J
VPMB8RG-3J
VPMB8RG-180J
VPMB8RN-3J
VPMB8RN-180J
VPMB8RS-3J
VPMB8RS-180J
VPMB8RSE-3J
VPMB8RSE-180J
VPMB8RU-3J
VPMB8RU-180J
VPMB10RF-3J
VPMB10RF-4J
VPMB10RF-4J-S3
VPMB10RG-3J
VPMB10RG-4J
VPMB10RN-3J
VPMB10RN-4J
VPMB10RS-3J
VPMB10RS-4J
VPMB10RSE-3J
VPMB10RSE-4J
VPMB10RU-3J
VPMB10RU-4J
VPMB15AF-3J
VPMB15AF-4J
VPMB15AG-3J
VPMB15AG-4J
VPMB15AN-3J
VPMB15AN-4J
VPMB15AS-3J
VPMB15AS-4J
VPMB15AU-3J
VPMB15AU-4J
VPMB15RF-3J

Standard Unit Price	Minimum order quantity	Standard Shipping Days ?	Pad Type	Mounting Method	Rubber Group Material	Usage Environment	Color	Outer Diameter D (φ)	Height L1 (mm)	Full length B (mm)	Mount Connection Screw	Vacuum Outlet Tube Outer Diameter (φ)	Metal parts material
19.44 €	1	10 Days	Compact	Recessed Type	Fluorine Rubber	Standard	Gray	4	4	15	M3 × 0.5	3	Standard Specifications
19.44 €	1	10 Days	Compact	Recessed Type	Fluorine Rubber	Standard	Gray	4	4	15	M3 × 0.5	1.8	Standard Specifications
12.37 €	1	10 Days	Compact	Recessed Type	NBR which conforms to Food Sanitation Law	Standard	Gray	4	4	15	M3 × 0.5	3	Standard Specifications
12.37 €	1	10 Days	Compact	Recessed Type	NBR which conforms to Food Sanitation Law	Standard	Gray	4	4	15	M3 × 0.5	1.8	Standard Specifications
11.66 €	1	10 Days	Compact	Recessed Type	[Nitrile Rubber] Nitrile Rubber	Standard	Black	4	4	15	M3 × 0.5	3	Standard Specifications
11.66 €	1	10 Days	Compact	Recessed Type	[Nitrile Rubber] Nitrile Rubber	Standard	Black	4	4	15	M3 × 0.5	1.8	Standard Specifications
13.03 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	4	4	15	M3 × 0.5	3	Standard Specifications
13.03 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	4	4	15	M3 × 0.5	1.8	Standard Specifications
13.03 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	4	4	15	M3 × 0.5	3	Standard Specifications
13.03 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	4	4	15	M3 × 0.5	1.8	Standard Specifications
15.76 €	1	10 Days	Compact	Recessed Type	Urethane Rubber	Standard	Blue	4	4	15	M3 × 0.5	3	Standard Specifications
15.76 €	1	10 Days	Compact	Recessed Type	Urethane Rubber	Standard	Blue	4	4	15	M3 × 0.5	1.8	Standard Specifications
20.34 €	1	10 Days	Compact	Recessed Type	Fluorine Rubber	Standard	Gray	6	7	19.5	M4 × 0.7	3	Standard Specifications
20.34 €	1	10 Days	Compact	Recessed Type	Fluorine Rubber	Standard	Gray	6	7	19.5	M4 × 0.7	1.8	Standard Specifications
13.29 €	1	10 Days	Compact	Recessed Type	NBR which conforms to Food Sanitation Law	Standard	Gray	6	7	19.5	M4 × 0.7	3	Standard Specifications
13.29 €	1	10 Days	Compact	Recessed Type	NBR which conforms to Food Sanitation Law	Standard	Gray	6	7	19.5	M4 × 0.7	1.8	Standard Specifications
12.56 €	1	10 Days	Compact	Recessed Type	[Nitrile Rubber] Nitrile Rubber	Standard	Black	6	7	19.5	M4 × 0.7	3	Standard Specifications
12.56 €	1	10 Days	Compact	Recessed Type	[Nitrile Rubber] Nitrile Rubber	Standard	Black	6	7	19.5	M4 × 0.7	1.8	Standard Specifications
13.93 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	6	7	19.5	M4 × 0.7	3	Standard Specifications
13.93 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	6	7	19.5	M4 × 0.7	1.8	Standard Specifications
13.93 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	6	7	19.5	M4 × 0.7	3	Standard Specifications
13.93 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	6	7	19.5	M4 × 0.7	1.8	Standard Specifications
16.68 €	1	10 Days	Compact	Recessed Type	Urethane Rubber	Standard	Blue	6	7	19.5	M4 × 0.7	3	Standard Specifications
16.68 €	1	10 Days	Compact	Recessed Type	Urethane Rubber	Standard	Blue	6	7	19.5	M4 × 0.7	1.8	Standard Specifications
21.09 €	1	10 Days	Compact	Recessed Type	Fluorine Rubber	Standard	Gray	8	5.5	18	M4 × 0.7	3	Standard Specifications
21.09 €	1	10 Days	Compact	Recessed Type	Fluorine Rubber	Standard	Gray	8	5.5	18	M4 × 0.7	1.8	Standard Specifications
13.29 €	1	10 Days	Compact	Recessed Type	NBR which conforms to Food Sanitation Law	Standard	Gray	8	5.5	18	M4 × 0.7	3	Standard Specifications
13.29 €	1	10 Days	Compact	Recessed Type	NBR which conforms to Food Sanitation Law	Standard	Gray	8	5.5	18	M4 × 0.7	1.8	Standard Specifications
12.56 €	1	10 Days	Compact	Recessed Type	[Nitrile Rubber] Nitrile Rubber	Standard	Black	8	5.5	18	M4 × 0.7	3	Standard Specifications
12.56 €	1	10 Days	Compact	Recessed Type	[Nitrile Rubber] Nitrile Rubber	Standard	Black	8	5.5	18	M4 × 0.7	1.8	Standard Specifications
13.93 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	8	5.5	18	M4 × 0.7	3	Standard Specifications
13.93 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber	Standard	[White] White	8	5.5	18	M4 × 0.7	1.8	Standard Specifications
13.93 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	8	5.5	18	M4 × 0.7	3	Standard Specifications
13.93 €	1	10 Days	Compact	Recessed Type	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	8	5.5	18	M4 × 0.7	1.8	Standard Specifications
16.68 €	1	10 Days	Compact	Recessed Type	Urethane Rubber	Standard	Blue	8	5.5	18	M4 × 0.7	3	Standard Specifications
16.68 €	1	10 Days	Compact	Recessed Type	Urethane Rubber	Standard	Blue	8	5.5	18	M4 × 0.7	1.8	Standard Specifications
22.64 €	1	10 Days	Compact	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	10	8	27	M5 × 0.8	3	Standard Specifications
23.00 €	1	10 Days	Compact	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	10	8	27	M5 × 0.8	4	Standard Specifications
36.10 €	1	11 Days	Compact	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	10	8	27	M5 × 0.8	4	Copper-free specification
14.85 €	1	10 Days	Compact	Pad Screw Fixed	NBR which conforms to Food Sanitation Law	Standard	Gray	10	8	27	M5 × 0.8	3	Standard Specifications
15.22 €	1	10 Days	Compact	Pad Screw Fixed	NBR which conforms to Food Sanitation Law	Standard	Gray	10	8	27	M5 × 0.8	4	Standard Specifications
14.11 €	1	10 Days	Compact	Pad Screw Fixed	[Nitrile Rubber] Nitrile Rubber	Standard	Black	10	8	27	M5 × 0.8	3	Standard Specifications
14.47 €	1	10 Days	Compact	Pad Screw Fixed	[Nitrile Rubber] Nitrile Rubber	Standard	Black	10	8	27	M5 × 0.8	4	Standard Specifications
15.48 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	10	8	27	M5 × 0.8	3	Standard Specifications
15.84 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	10	8	27	M5 × 0.8	4	Standard Specifications
15.48 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	10	8	27	M5 × 0.8	3	Standard Specifications
15.84 €	1	10 Days	Compact	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber +Carbon	Standard / Static electricity diffusion	Black	10	8	27	M5 × 0.8	4	Standard Specifications
18.24 €	1	10 Days	Compact	Pad Screw Fixed	Urethane Rubber	Standard	Blue	10	8	27	M5 × 0.8	3	Standard Specifications
18.60 €	1	10 Days	Compact	Pad Screw Fixed	Urethane Rubber	Standard	Blue	10	8	27	M5 × 0.8	4	Standard Specifications
24.65 €	1	10 Days	Deep Type	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	15	10	29	M5 × 0.8	3	Standard Specifications
25.01 €	1	10 Days	Deep Type	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	15	10	29	M5 × 0.8	4	Standard Specifications
15.31 €	1	10 Days	Deep Type	Pad Screw Fixed	NBR which conforms to Food Sanitation Law	Standard	Gray	15	10	29	M5 × 0.8	3	Standard Specifications
15.67 €	1	10 Days	Deep Type	Pad Screw Fixed	NBR which conforms to Food Sanitation Law	Standard	Gray	15	10	29	M5 × 0.8	4	Standard Specifications
14.58 €	1	10 Days	Deep Type	Pad Screw Fixed	[Nitrile Rubber] Nitrile Rubber	Standard	Black	15	10	29	M5 × 0.8	3	Standard Specifications
14.94 €	1	10 Days	Deep Type	Pad Screw Fixed	[Nitrile Rubber] Nitrile Rubber	Standard	Black	15	10	29	M5 × 0.8	4	Standard Specifications
15.94 €	1	10 Days	Deep Type	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	15	10	29	M5 × 0.8	3	Standard Specifications
16.32 €	1	10 Days	Deep Type	Pad Screw Fixed	[Silicone Rubber] Silicone Rubber	Standard	[White] White	15	10	29	M5 × 0.8	4	Standard Specifications
19.16 €	1	10 Days	Deep Type	Pad Screw Fixed	Urethane Rubber	Standard	Blue	15	10	29	M5 × 0.8	3	Standard Specifications
19.53 €	1	10 Days	Deep Type	Pad Screw Fixed	Urethane Rubber	Standard	Blue	15	10	29	M5 × 0.8	4	Standard Specifications
24.65 €	1	10 Days	Compact	Pad Screw Fixed	Fluorine Rubber	Standard	Gray	15	9	28	M5 × 0.8	3	Standard Specifications

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Basic information

Pad type	Standard / Holder Set	Material	Rubber-Based	Mounting Bracket	Fixed Type
Vacuum Outlet Direction	Horizontal	Fall Prevention Valve	None	Direct Attached Filter	None

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Basic Attributes

Pad Type
- Deep Type
- Compact
Clear
Mounting Method
- Recessed Type
- Pad Screw Fixed
Clear
Rubber Group Material
- Nitrile Rubber
  - Nitrile Rubber
- NBR which conforms to Food Sanitation Law
- Silicone Rubber
  - Silicone Rubber
  - Silicone Rubber +Carbon
- Urethane Rubber
- Fluorine Rubber
Clear
Color
- Black
- Gray
- White
  - White
- Blue
Clear
Outer Diameter D(φ)
0.7

1

1.5

2

3

4

6

8

10

15

20

25

30
Clear
Height L1(mm)
4

5.5

7

8

9

10

11

12

14
Clear
Full length B(mm)
15

18

19.5

27

28

29

31.2

32.2

33.2

35.2
Clear
Mount Connection Screw
- M3 × 0.5
- M4 × 0.7
- M5 × 0.8
Clear
Vacuum Outlet Tube Outer Diameter(φ)
- 1.8
- 3
- 4
Clear
Metal parts material
- Copper-free specification
- Standard Specifications
Clear
Type
- VPMB
Clear
Usage Environment
- Standard
- Static electricity diffusion
Clear
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- 2D
- 3D
Clear