X / Y-Axis Slim Stage (Manual Stage)

Stage surface (length) (range of selection)

(mm)

Stage surface (width) (range of selection)

(mm)

Load Capacity (Range Selectable)

(N)

Feeding Method

Table Material

Table Surface Treatment

Stage surface (length)

(mm)

Stage surface (width)

(mm)

Horizontal Load Capacity

(N)

Parallelism

(µm)

Moment Rigidity And Pitch Rigidity

("/N•cm)

Moment Rigidity And Yaw Rigidity

("/N•cm)

Moment Rigidity And Roll Rigidity

("/N•cm)

Mounting position of the operation part