Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

(i)Remark

■ SMC Product Line
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CQ2/MG types, etc., are already available.
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*The information above is correct as of December 2018.
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Part Number

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Data to be displayed: 30; 45; 60

Part Number
XLD-25L-M9//
XLD-40
XLD-40L-M9//

Standard Unit Price	Minimum order quantity	Standard Shipping Days ?	Flange Calls	Sonic Conductance	Pilot Port Direction	Switch Part Number
884.79 €	1	26 Days	25	14L/S	Flange surface, back	No auto-switch (with built-in magnet)
1,283.57 €	1	22 Days	40	45L/S	Flange side	No auto-switch (no built-in magnet)
1,060.13 €	1	22 Days	40	45L/S	Flange surface, back	No auto-switch (with built-in magnet)

Basic information

Type	Vacuum operation vacuum valves	Application	Single Item Operating	Installation method	Direct
Number of Ports	2-port valve	Switching Type	2-position Normally Closed	Pipe Port Type	Flange
Flange Type	KF	Seal Type	Bellows seal	Temperature Range(°C)	5 to 60
Number of Switches	No switch	Seal material	FKM 1349-80	Amount of leakage(Pa·m³/s)	Internal: 1.3 × 10^-10, External: 1.3 × 10^-11
Body Surface Treatment	External: hard anodized aluminum, Internal: base material	Seal Change Location	None	Heater Yes/No	None

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Basic Attributes

Flange Calls
- 25
- 40
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Sonic Conductance
14L/S

45L/S
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Pilot Port Direction
- Flange side
- Flange surface, back
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Switch Part Number
No auto-switch (no built-in magnet)

No auto-switch (with built-in magnet)
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Type
- XLD
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- 3D
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