Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

A vacuum valve for preventing pumps from running when overloaded.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Adjustable flow rate for initial exhaust valve.
· Body material: SCS13 (SUS304 equivalent).
· Precision-cast single-piece structure which helps prevent gas accumulation.
· The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

(i)Remark

■ SMC Product Line
Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

■ Products Planned for Online Release
Air cylinder-related product pages will be released on this site on an ad-hoc basis.
CQ2/MG types, etc., are already available.
*Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
*The information above is correct as of December 2018.
The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

Part Number

Once your search is narrowed to one product,
the corresponding part number is displayed here.

Product specification
Part Numbers
Catalog

Stainless Steel High Vacuum Angle Valves / In-Line Valve, 2-Stage Control, Single Acting / Bellows Seal, O-Ring Seal, XMD/XYD Series Specifications

Angle valve XMD Series external appearance

Angle valve XMD series pilot port direction

In-line type XYD series external appearance

In-line type XYD series pilot port direction

Model		XMD-25 XYD-25	XMD-40 XYD-40	XMD-50 XYD-50	XMD-63 XYD-63	XMD-80 XYD-80
Flange (Valve) Size		25	40, CF070	50	63, CF114	80
Valve Type		Normally closed (pressurize to open and spring seal) (both main and initial exhaust valves)
Fluids		Inert gas under vacuum
Operating Temperature (°C)		5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs)		1 × 10^-6 up to atmospheric pressure
Conductance L/s ^{Note 1}	Main Exhaust Valve	14	45	80	160	200
Conductance L/s ^{Note 1}	Initial Exhaust Valve	0.5 to 3	2 to 8	2.5 to 11	4 to 18	4 to 18
Leakage Pa·m³/s	Internal	For standard material (FKM): 1.3 × 10^-10, values at ambient temperature and excluding gas permeation
Leakage Pa·m³/s	External	For standard material (FKM): 1.3 × 10^-11, values at ambient temperature and excluding gas permeation
Operating Time (s)	Main Exhaust Valve	0.10	0.21	0.24	0.26	0.28
Operating Time (s)	Initial Exhaust Valve	0.70	0.08	0.09	0.23	0.27
Flange Type		KF (NW)	KF (NW), CF	KF (NW)	KF (NW), K (DN), CF	KF (NW), K (DN)
Flange Type		KF (NW)	KF (NW), CF	KF (NW)	KF (NW), K (DN), CF	KF (NW), K (DN)
Principal Material ^{Note 3}		Main body: SCS13 (Stainless steel 304 equivalent), Bellows: Stainless steel 316L, Bellows holder: Stainless steel 304, FKM (standard seal material)
Pilot Pressure MPa (G)		0.4 to 0.7 (both main and initial exhaust valves)
Pilot Port Size		M5	Rc 1/8
Weight kg ^{Note 2}	XMD	0.65	1.50 (1.86)	2.20	4.10 (5.46)	6.80
Weight kg ^{Note 2}	XYD	0.71	1.52	2.60	4.80	8.30

Note 1: The main exhaust valve conductance is the value for the “molecular flow” of an elbow with the same dimensions. The initial exhaust valve conductance is the “viscous flow” value.
Note 2: Figures in ( ) indicate the weight for CF (ConFlat) fittings.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.

Product Drawing

(Unit: mm)

XMD angle type dimensional drawing

XYD in-line type dimensional drawing

Model	A	B	C	D	Fn	Fd	Fc	G	H	J	K	P.C.D. L1	L2
XMD-25	50	123	48	1	40	-	-	26	41	16	7.5	-	-
XMD-40	65	170	66	2	55	-	70	41	63	20	15	P.C.D 58.7	6 × ø6.6 mm
XMD-50	70	183	79	2	75	-	-	52	68	20	17.5	-	-
XMD-63	88	217	100	3	87	95	114	70	72	20	19.5	P.C.D 92.1	8 × ø8.4 mm
XMD-80	90	256	117	3	114	110	-	83	98	20	26.5	-	-

Model	A	B	C	D	E	Fn	Fd	G	H	J	K
XYD-25	100.2	86.7	48	1	23.5	40	-	26	66	16	7.5
XYD-40	130	114	66	2	38	55	-	41	84	20	15
XYD-50	178	128	79	2	53	75	-	52	95	20	17.5
XYD-63	209	163	100	3	61	87	95	70	121	20	19.5
XYD-80	268	193	117	3	80	114	110	83	144	20	26.5

Product Diagram

XMD angle type diagram

XYD in-line type diagram

*Refer to p. 497 of the manufacturer's catalog for maintenance parts.

Product Working Principle

1. Initial exhaust valve opening adjustment
Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise. See figure to the right for the relationship between the number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance.
2. Opening of the initial exhaust valve (valve S)
When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount.
3. Opening of the main exhaust valve (valve M)
When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully.
4. Closing of the initial and main exhaust valves
Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them.

Graph showing number of adjustment nut rotations (pitch: 1 mm) and the initial exhaust valve conductance

Notes

*The body material is SCS13 (Stainless steel 304 equivalent), the bellows material is Stainless steel 316L and the metal material used for other vacuum parts is Stainless steel 304. The standard seal material for vacuum parts is FKM, but it can be changed for other materials (see section on part number notation). Check that the fluid in use will not damage the selected material.
*Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
*The temperature of the switch part must be no higher than 60°C.
*Refer to the manufacturer's catalog for product information not detailed above.

Data to be displayed: 30; 45; 60

Part Number
XMD-25-XN1A
XMD-40-XN1A
XMD-40-XR1A
XMD-40CL-A93LA-XS1B
XMD-40H0-XN1A
XMD-40L-M9//-XQ1A
XMD-40M-XQ1A
XMD-50-XN1A
XMD-50H0-XN1A
XMD-50H0-XR1A
XMD-50LH0-XQ1A
XYD-25H0-XN1A
XYD-50H0-XN1A

Standard Unit Price	Minimum order quantity	Standard Shipping Days ?	Flange Type	Flange Calls	Sonic Conductance	Valve Type	Pilot Port Direction	Temperature Range (°C)	Switch Part Number	Number of Switches	Seal material	Amount of leakage (Pa·m³/s)	Seal Change Location	Length of Lead Wire for Switch (m)
931.04 €	1	26 Days	KF	25	14L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
1,311.81 €	1	26 Days	KF	40	45L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
2,006.16 €	1	26 Days	KF	40	45L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	Chemraz SS592	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
1,432.69 €	1	26 Days	CF	40	45L/S	Angle type	Flange surface, back	5 to 60	D-A93 reed auto switch	2 pcs. valve open/closed	VMQ 1232-70	Internal: 1.3 × 10^-8, External: 1.3 × 10^-11	Valve seal / S valve seal assembly / O-ring for fixing	3
1,327.61 €	1	26 Days	KF	40	45L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
1,614.27 €	1	26 Days	KF	40	45L/S	Angle type	Flange surface, back	5 to 60	No auto-switch (with built-in magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
1,639.34 €	1	26 Days	KF	40	45L/S	Angle type	Flange surface, right	5 to 60	No auto-switch (no built-in magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
1,522.30 €	1	26 Days	KF	50	80L/S	Angle type	Flange side	5 to 60	No auto-switch (no built-in magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
1,542.81 €	1	26 Days	KF	50	80L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
2,495.83 €	1	26 Days	KF	50	80L/S	Angle type	Flange side	5 to 150	No auto-switch (no built-in magnet)	No switch	Chemraz SS592	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
2,000.46 €	1	26 Days	KF	50	80L/S	Angle type	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No switch	Kalrez 4079	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
819.61 €	1	60 Days	KF	25	14L/S	In-line type	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-
1,303.53 €	1	60 Days	KF	50	80L/S	In-line type	Flange surface, back	5 to 150	No auto-switch (no built-in magnet)	No switch	EPDM 2101-80	Internal: 1.3 × 10^-8, External: 1.3 × 10^-9	Valve seal / external seal / S valve seal assembly / O-ring for fixing	-

Basic information

Type	Pilot Vacuum Valve	Application	Single Item Operating	Installation method	Direct
Number of Ports	2-port valve	Switching Type	2-position Normally Closed	Pipe Port Type	Flange
Seal Type	Bellows seal

Configure

13Suggestion of an applicable part number.

View Part Numbers

Some specification is not specified yet.

The part number is completed.

Basic Attributes

Flange Type
- KF
- CF
Clear
Flange Calls
- 25
- 40
- 50
Clear
Sonic Conductance
14L/S

45L/S

80L/S
Clear
Valve Type
- Angle type
- In-line type
Clear
Pilot Port Direction
- Flange side
- Flange surface, back
- Flange surface, right
Clear
Temperature Range(°C)
- 5 to 60
- 5 to 150
Clear
Switch Part Number
D-A93 reed auto switch

No auto-switch (no built-in magnet)

No auto-switch (with built-in magnet)
Clear
Number of Switches
- 2 pcs. valve open/closed
- No switch
Clear
Seal material
Chemraz SS592

VMQ 1232-70

EPDM 2101-80

Kalrez 4079
Clear
Amount of leakage(Pa·m³/s)
- Internal: 1.3 × 10^-8, External: 1.3 × 10^-11
- Internal: 1.3 × 10^-8, External: 1.3 × 10^-9
Clear
Seal Change Location
Valve seal / S valve seal assembly / O-ring for fixing

Valve seal / external seal / S valve seal assembly / O-ring for fixing
Clear
Length of Lead Wire for Switch(m)
- 3
Clear
Type
- XMD
- XYD
Clear
Filter by CAD data type
- 2D
- 3D
Clear