Air Slide Table, Clean and Low Dust Generation 13 / 20 / 22-MXQ Series

[13-Series Clean Series]
・ This product can be used in a clean environment.
・ Prevents dust generation in the cleanroom.
[20-Series Copper/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided.
・ External dimensions are the same as standard products.
[22-Series, Copper-Free / Fluorine-Free / Silicone-Free + Low Dust Generation]
・ This product can be used in environments with restrictions on copper-based, fluorine-based, and silicone-based materials.
·The structure is the same as the clean series (grease and packaging form are different from the clean series).

(i)Remark

■ SMC Air Cylinder Product Selection and Technical Information
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Part Number

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Product specification
Part Numbers
Catalog

Please refer to the table below for details about lead wire / connector specifications.

Data to be displayed: 30; 45; 60

Part Number
13-MXQ6-10
13-MXQ6-20
13-MXQ6-40
13-MXQ6L-10A
13-MXQ6L-20
13-MXQ6L-40
13-MXQ6L-50
13-MXQ8-30
13-MXQ8-30CS
13-MXQ8-40
13-MXQ8-75CS
13-MXQ8L-10A
13-MXQ8L-20ASP
13-MXQ8L-30
13-MXQ8L-50
13-MXQ8L-75AS
13-MXQ12-10
13-MXQ12-30A
13-MXQ12-40
13-MXQ12-40A-M9N
13-MXQ12-50
13-MXQ12-50A
13-MXQ12-75
13-MXQ12-75A
13-MXQ12-100
13-MXQ12L-50
13-MXQ12L-50A
13-MXQ16-20
13-MXQ16-30
13-MXQ16-40
13-MXQ16-50
13-MXQ16-50A
13-MXQ16-100
13-MXQ16-100A
13-MXQ16-100AS
13-MXQ16-125
13-MXQ16-125A
13-MXQ16L-20
13-MXQ16L-20AS
13-MXQ16L-20AS-A93L
13-MXQ16L-30
13-MXQ16L-40
13-MXQ16L-50
13-MXQ16L-75
13-MXQ16L-100
13-MXQ20-20
13-MXQ20-20A
13-MXQ20-20C
13-MXQ20-50A
13-MXQ20-50CS
13-MXQ20-75
13-MXQ20-75A
13-MXQ20-100
13-MXQ20-125
13-MXQ20-150
13-MXQ20-150A
13-MXQ20L-20
13-MXQ20TF-30ASP
13-MXQ20TFL-30ASP
13-MXQ25-10

Standard Unit Price	Minimum order quantity	Standard Shipping Days ?	Stroke (mm)	Max. Load Mass (Range Selectable) (kg)	Table Size Length L (mm)	Cylinder Inner Diameter (Ø)	Usage Environment	Table Size Width W (mm)	Table Size Height H (mm)	Table Parallelism (µm)	Piping Format	Port Screw Type	Adjuster Option	Specifications	Number of Switches	Custom-made Specifications	Model	Type
606.03 €	1	26 Days	10	0.05~0.8	63	6	Dust-Proof / Cleanroom	27	20	25	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
650.47 €	1	26 Days	20	0.05~0.8	73	6	Dust-Proof / Cleanroom	27	20	30	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
754.97 €	1	26 Days	40	0.05~0.8	101	6	Dust-Proof / Cleanroom	27	20	40	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
719.60 €	1	26 Days	10	0.05~0.8	63	6	Dust-Proof / Cleanroom	27	20	25	Symmetrical type	M screw	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
656.50 €	1	26 Days	20	0.05~0.8	73	6	Dust-Proof / Cleanroom	27	20	30	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
761.00 €	1	26 Days	40	0.05~0.8	101	6	Dust-Proof / Cleanroom	27	20	40	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
808.05 €	1	26 Days	50	0.05~0.8	111	6	Dust-Proof / Cleanroom	27	20	45	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
715.79 €	1	26 Days	30	1~4.9	94	8	Dust-Proof / Cleanroom	32	23	35	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
772.58 €	1	26 Days	30	1~4.9	94	8	Dust-Proof / Cleanroom	32	23	35	Standard type	M screw	Forward-end metal stopper	Standard	Without auto switch (built-in magnet)	None	None	Clean series
767.98 €	1	26 Days	40	1~4.9	108	8	Dust-Proof / Cleanroom	32	23	40	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,002.42 €	1	26 Days	75	1~4.9	159	8	Dust-Proof / Cleanroom	32	23	65	Standard type	M screw	Forward-end metal stopper	Standard	Without auto switch (built-in magnet)	None	None	Clean series
784.52 €	1	26 Days	10	1~4.9	70	8	Dust-Proof / Cleanroom	32	23	25	Symmetrical type	M screw	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
796.52 €	1	26 Days	20	1~4.9	80	8	Dust-Proof / Cleanroom	32	23	30	Symmetrical type	M screw	Forward-end rubber stopper	Axial direction piping type	Without auto switch (built-in magnet)	None	None	Clean series
723.31 €	1	26 Days	30	1~4.9	94	8	Dust-Proof / Cleanroom	32	23	35	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
822.56 €	1	26 Days	50	1~4.9	133	8	Dust-Proof / Cleanroom	32	23	55	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,009.94 €	1	26 Days	75	1~4.9	159	8	Dust-Proof / Cleanroom	32	23	65	Symmetrical type	M screw	Forward-end rubber stopper	Standard	Without auto switch (built-in magnet)	None	None	Clean series
727.48 €	1	26 Days	10	1~4.9	94	12	Dust-Proof / Cleanroom	39	30	30	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
844.94 €	1	26 Days	30	1~4.9	104	12	Dust-Proof / Cleanroom	39	30	35	Standard type	M screw	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
783.69 €	1	26 Days	40	1~4.9	121	12	Dust-Proof / Cleanroom	39	30	40	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
961.02 €	1	26 Days	40	1~4.9	121	12	Dust-Proof / Cleanroom	39	30	40	Standard type	M screw	Dual-end rubber stoppers	Standard	M9N	0.5	2 pcs.	Clean series
830.68 €	1	26 Days	50	1~4.9	131	12	Dust-Proof / Cleanroom	39	30	45	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
944.19 €	1	26 Days	50	1~4.9	131	12	Dust-Proof / Cleanroom	39	30	45	Standard type	M screw	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
961.32 €	1	26 Days	75	1~4.9	175	12	Dust-Proof / Cleanroom	39	30	65	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,074.84 €	1	26 Days	75	1~4.9	175	12	Dust-Proof / Cleanroom	39	30	65	Standard type	M screw	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,078.85 €	1	26 Days	100	1~4.9	200	12	Dust-Proof / Cleanroom	39	30	75	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
838.21 €	1	26 Days	50	1~4.9	131	12	Dust-Proof / Cleanroom	39	30	45	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
951.71 €	1	26 Days	50	1~4.9	131	12	Dust-Proof / Cleanroom	39	30	45	Symmetrical type	M screw	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
767.98 €	1	26 Days	20	1~4.9	108	16	Dust-Proof / Cleanroom	49	37	35	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
770.60 €	1	26 Days	30	1~4.9	118	16	Dust-Proof / Cleanroom	49	37	40	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
817.60 €	1	26 Days	40	1~4.9	128	16	Dust-Proof / Cleanroom	49	37	45	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
864.65 €	1	26 Days	50	1~4.9	144	16	Dust-Proof / Cleanroom	49	37	50	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
978.18 €	1	26 Days	50	1~4.9	144	16	Dust-Proof / Cleanroom	49	37	50	Standard type	M screw	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,128.53 €	1	26 Days	100	1~4.9	219	16	Dust-Proof / Cleanroom	49	37	80	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,242.05 €	1	26 Days	100	1~4.9	219	16	Dust-Proof / Cleanroom	49	37	80	Standard type	M screw	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,185.32 €	1	26 Days	100	1~4.9	219	16	Dust-Proof / Cleanroom	49	37	80	Standard type	M screw	Forward-end rubber stopper	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,253.87 €	1	26 Days	125	1~4.9	244	16	Dust-Proof / Cleanroom	49	37	95	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,367.39 €	1	26 Days	125	1~4.9	244	16	Dust-Proof / Cleanroom	49	37	95	Standard type	M screw	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
776.94 €	1	26 Days	20	1~4.9	108	16	Dust-Proof / Cleanroom	49	37	35	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
833.73 €	1	26 Days	20	1~4.9	108	16	Dust-Proof / Cleanroom	49	37	35	Symmetrical type	M screw	Forward-end rubber stopper	Standard	Without auto switch (built-in magnet)	None	None	Clean series
830.81 €	1	26 Days	20	1~4.9	108	16	Dust-Proof / Cleanroom	49	37	35	Symmetrical type	M screw	Forward-end rubber stopper	Standard	A93	3	2 pcs.	Clean series
779.56 €	1	26 Days	30	1~4.9	118	16	Dust-Proof / Cleanroom	49	37	40	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
826.55 €	1	26 Days	40	1~4.9	128	16	Dust-Proof / Cleanroom	49	37	45	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
873.61 €	1	26 Days	50	1~4.9	144	16	Dust-Proof / Cleanroom	49	37	50	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,004.21 €	1	26 Days	75	1~4.9	176	16	Dust-Proof / Cleanroom	49	37	65	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,137.48 €	1	26 Days	100	1~4.9	219	16	Dust-Proof / Cleanroom	49	37	80	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
901.21 €	1	26 Days	20	5~9.2	131	20	Dust-Proof / Cleanroom	60	46	40	Standard type	Rc	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,014.73 €	1	26 Days	20	5~9.2	131	20	Dust-Proof / Cleanroom	60	46	40	Standard type	Rc	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,014.71 €	1	26 Days	20	5~9.2	131	20	Dust-Proof / Cleanroom	60	46	40	Standard type	Rc	Dual-end metal stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,124.47 €	1	26 Days	50	5~9.2	159	20	Dust-Proof / Cleanroom	60	46	55	Standard type	Rc	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,067.74 €	1	26 Days	50	5~9.2	159	20	Dust-Proof / Cleanroom	60	46	55	Standard type	Rc	Forward-end metal stopper	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,133.73 €	1	26 Days	75	5~9.2	192	20	Dust-Proof / Cleanroom	60	46	70	Standard type	Rc	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,247.24 €	1	26 Days	75	5~9.2	192	20	Dust-Proof / Cleanroom	60	46	70	Standard type	Rc	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,253.87 €	1	26 Days	100	5~9.2	249	20	Dust-Proof / Cleanroom	60	46	95	Standard type	Rc	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,381.90 €	1	26 Days	125	5~9.2	277	20	Dust-Proof / Cleanroom	60	46	105	Standard type	Rc	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,509.85 €	1	26 Days	150	5~9.2	305	20	Dust-Proof / Cleanroom	60	46	125	Standard type	Rc	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,623.37 €	1	26 Days	150	5~9.2	305	20	Dust-Proof / Cleanroom	60	46	125	Standard type	Rc	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
920.66 €	1	26 Days	20	5~9.2	131	20	Dust-Proof / Cleanroom	60	46	40	Symmetrical type	Rc	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
1,071.52 €	1	26 Days	30	5~9.2	131	20	Dust-Proof / Cleanroom	60	46	40	Standard type	G	Forward-end rubber stopper	Axial direction piping type	Without auto switch (built-in magnet)	None	None	Clean series
1,091.19 €	1	26 Days	30	5~9.2	131	20	Dust-Proof / Cleanroom	60	46	40	Symmetrical type	G	Forward-end rubber stopper	Axial direction piping type	Without auto switch (built-in magnet)	None	None	Clean series
1,018.77 €	1	26 Days	10	5~9.2	147.5	25	Dust-Proof / Cleanroom	74	55	45	Standard type	Rc	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series

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Basic information

Type	L-Shaped Table Type	Table Material	Aluminum	Table Surface Treatment	Electroless Nickel Plating
Guide	Linear guide type	Operating Pressure(MPa)	0.15 to 0.7	End Block	None
Custom-made	None

Configure

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The part number is completed.

Basic Attributes

Stroke(mm)
10

20

30

40

50

75

100

125

150
Clear
Max. Load Mass (Range Selectable)(kg)
0.05~0.8

1~4.9

5~9.2
Clear
Table Size Length L(mm)
63

70

73

80

94

101

104

108

111

118

121

128

131

133

144

147.5

156

159

175

176

181.5

192

200

206.5

219

244

245.5

249

277

305

323.5
Clear
Cylinder Inner Diameter(Ø)
6

8

12

16

20

25
Clear
Usage Environment
- Dust-Proof
- Copper-Based / Fluorine-Based Material Not Used
- Cleanroom
Clear
Table Size Width W(mm)
27

32

39

46

49

60

74
Clear
Table Size Height H(mm)
20

23

30

37

46

55
Clear
Table Parallelism(µm)
25

30

35

40

45

50

55

60

65

70

75

80

95

105

125
Clear
Piping Format
Standard type

Symmetrical type
Clear
Port Screw Type
- G
- M screw
- Rc
Clear
Adjuster Option
Dual-end metal stoppers

Dual-end rubber stoppers

Forward-end metal stopper

Forward-end rubber stopper

No adjuster
Clear
Specifications
- Axial direction piping type
- Standard
Clear
Number of Switches
M9N

A93

Without auto switch (built-in magnet)
Clear
Custom-made Specifications
- 0.5
- 3
- None
Clear
Model
- 2 pcs.
- None
Clear
Type
- Clean series
- Copper and Fluorine Unavailable Specifications
- Copper/fluorine/silicon-free + low dust generation
Clear
Type
- 13-MXQ
- 20-MXQ
- 22-MXQ
Clear
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- 3D
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