SMC Single Axis Robots

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Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)

    Electric cylinder LZB series

      Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

        Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

          Electric actuator rod type motorless specification LEY series

            Step motor controller JXCE1, 91, P1, D1, L1 series

            • Promotional pricing ends 31/12/2024

            Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

              Controller (Step Data Input Type) LECP6 (Step Motor) / LECA6 (Servo Motor) Series

                Electric actuator slider type belt drive motorless specification LEFB series

                  Step motor driver LECPA series

                    Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                      Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                        Electric actuator rod type with guide motorless specification LEYG series

                          Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

                            Programless controller LECP1 series

                              Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                Electric Actuator Miniature Slide Table Type LEPS Series Step Motor

                                  Electric actuator guided rod type LEYG series AC servo motor LECS□

                                  • Promotional pricing ends 31/12/2024

                                  Electric Slide Table, Compact Type LES Series

                                    Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                      Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                        Electric actuator rod type LEY series AC servo motor LECS□

                                          Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□

                                            Electric actuator rod type LEY series AC servo motor LECY□

                                              Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                                Electric actuator support guide belt drive LEFG series

                                                  Electric actuator miniature rod type LEPY series step motor (Servo 24 V DC)

                                                    Electric slide table high rigidity type LESH series

                                                      Card motor LAT3 series

                                                        Gateway unit LEC-G series

                                                          Programless controller LECP2 series with stroke learning function

                                                            Electric Actuator Guide Rod Slider Belt Drive LEL Series Step Motor

                                                              Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                Electric actuator support guide 11-LEFG series

                                                                  Electric Actuator, Guide Rod Type, LEYG Series

                                                                    AC Servo Motor Driver, Incremental Type, LECSA Series / Absolute Type

                                                                      AC Servo Motor Driver, Absolute Type LECSS-T Series

                                                                        Electric cylinder LZC series

                                                                          4-axis step motor controller JXC73 / 83/93 series

                                                                            Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                              Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                                                                Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                                                  Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                                    Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                                      AC servo motor driver absolute type LECYM / LECYU series

                                                                                        3-axis step motor controller JXC92 series

                                                                                        Brand

                                                                                        SMC

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                                                                                        SMC

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                                                                                        SMC

                                                                                        SMC

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                                                                                        SMC

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                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

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                                                                                        SMC

                                                                                        SMC

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                                                                                        SMC

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                                                                                        SMC

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                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

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                                                                                        SMC

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                                                                                        SMC

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                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

                                                                                        SMC

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                                                                                        Product Series

                                                                                        Electric cylinder LZB series

                                                                                        Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

                                                                                        Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

                                                                                        Electric actuator rod type motorless specification LEY series

                                                                                        Step motor controller JXCE1, 91, P1, D1, L1 series

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                                                                        Controller (Step Data Input Type) LECP6 (Step Motor) / LECA6 (Servo Motor) Series

                                                                                        Electric actuator slider type belt drive motorless specification LEFB series

                                                                                        Step motor driver LECPA series

                                                                                        Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                                                                                        Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                                                                        Electric actuator rod type with guide motorless specification LEYG series

                                                                                        Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

                                                                                        Programless controller LECP1 series

                                                                                        Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                                                        Electric Actuator Miniature Slide Table Type LEPS Series Step Motor

                                                                                        Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                                                        Electric Slide Table, Compact Type LES Series

                                                                                        Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                                                        Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                                        Electric actuator rod type LEY series AC servo motor LECS□

                                                                                        Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□

                                                                                        Electric actuator rod type LEY series AC servo motor LECY□

                                                                                        Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                                                                        Electric actuator support guide belt drive LEFG series

                                                                                        Electric actuator miniature rod type LEPY series step motor (Servo 24 V DC)

                                                                                        Electric slide table high rigidity type LESH series

                                                                                        Card motor LAT3 series

                                                                                        Gateway unit LEC-G series

                                                                                        Programless controller LECP2 series with stroke learning function

                                                                                        Electric Actuator Guide Rod Slider Belt Drive LEL Series Step Motor

                                                                                        Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                                        Electric actuator support guide 11-LEFG series

                                                                                        Electric Actuator, Guide Rod Type, LEYG Series

                                                                                        AC Servo Motor Driver, Incremental Type, LECSA Series / Absolute Type

                                                                                        AC Servo Motor Driver, Absolute Type LECSS-T Series

                                                                                        Electric cylinder LZC series

                                                                                        4-axis step motor controller JXC73 / 83/93 series

                                                                                        Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                                        Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                                                                        Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                                        AC servo motor driver absolute type LECYM / LECYU series

                                                                                        3-axis step motor controller JXC92 series

                                                                                        CAD
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                                                                                        Starting from

                                                                                        278.34 €

                                                                                        *Unit price with basic configuration

                                                                                        595.53 €

                                                                                        *Unit price with basic configuration

                                                                                        988.33 €

                                                                                        *Unit price with basic configuration

                                                                                        475.09 €

                                                                                        *Unit price with basic configuration

                                                                                        5.19 €

                                                                                        *Unit price with basic configuration

                                                                                        127.39 €

                                                                                        Special price

                                                                                        *Unit price with basic configuration

                                                                                        Promotional pricing ends 31/12/2024

                                                                                        7.27 €

                                                                                        *Unit price with basic configuration

                                                                                        138.39 €

                                                                                        *Unit price with basic configuration

                                                                                        5.73 €

                                                                                        *Unit price with basic configuration

                                                                                        1,432.34 €

                                                                                        *Unit price with basic configuration

                                                                                        24.21 €

                                                                                        *Unit price with basic configuration

                                                                                        97.34 €

                                                                                        *Unit price with basic configuration

                                                                                        924.41 €

                                                                                        *Unit price with basic configuration

                                                                                        16.49 €

                                                                                        *Unit price with basic configuration

                                                                                        2,232.19 €

                                                                                        *Unit price with basic configuration

                                                                                        598.76 €

                                                                                        *Unit price with basic configuration

                                                                                        1,213.06 €

                                                                                        *Unit price with basic configuration

                                                                                        627.53 €

                                                                                        Special price

                                                                                        *Unit price with basic configuration

                                                                                        Promotional pricing ends 31/12/2024

                                                                                        1,209.41 €

                                                                                        *Unit price with basic configuration

                                                                                        1,995.80 €

                                                                                        *Unit price with basic configuration

                                                                                        1,000.57 €

                                                                                        *Unit price with basic configuration

                                                                                        1,878.61 €

                                                                                        *Unit price with basic configuration

                                                                                        1,173.60 €

                                                                                        *Unit price with basic configuration

                                                                                        37.09 €

                                                                                        *Unit price with basic configuration

                                                                                        383.87 €

                                                                                        *Unit price with basic configuration

                                                                                        493.87 €

                                                                                        *Unit price with basic configuration

                                                                                        695.53 €

                                                                                        *Unit price with basic configuration

                                                                                        13.87 €

                                                                                        *Unit price with basic configuration

                                                                                        15.61 €

                                                                                        *Unit price with basic configuration

                                                                                        343.51 €

                                                                                        *Unit price with basic configuration

                                                                                        520.43 €

                                                                                        *Unit price with basic configuration

                                                                                        1,094.31 €

                                                                                        *Unit price with basic configuration

                                                                                        371.60 €

                                                                                        *Unit price with basic configuration

                                                                                        1,224.97 €

                                                                                        *Unit price with basic configuration

                                                                                        83.24 €

                                                                                        *Unit price with basic configuration

                                                                                        1,124.51 €

                                                                                        *Unit price with basic configuration

                                                                                        380.90 €

                                                                                        *Unit price with basic configuration

                                                                                        12.15 €

                                                                                        *Unit price with basic configuration

                                                                                        679.23 €

                                                                                        *Unit price with basic configuration

                                                                                        1,128.06 €

                                                                                        *Unit price with basic configuration

                                                                                        1,570.63 €

                                                                                        *Unit price with basic configuration

                                                                                        918.92 €

                                                                                        *Unit price with basic configuration

                                                                                        1,348.27 €

                                                                                        *Unit price with basic configuration

                                                                                        17.32 €

                                                                                        *Unit price with basic configuration

                                                                                        1,682.18 €

                                                                                        *Unit price with basic configuration

                                                                                        Min. Shipping Days : 4 Days 7 Days 4 Days 9 Days 4 Days Same day 4 Days 26 Days 12 Days 26 Days 7 Days 7 Days 4 Days 9 Days 26 Days 15 Days 26 Days Same day 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 15 Days 8 Days 17 Days 4 Days 26 Days 26 Days 26 Days 26 Days 4 Days 4 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days
                                                                                        Main Body, Peripheral ComponentsMain BodyMain BodyMain BodyMain BodyPeripheral ComponentsMain Body / Peripheral ComponentsPeripheral ComponentsMain Body / Peripheral ComponentsPeripheral ComponentsMain BodyMain Body / Peripheral ComponentsMain Body / Peripheral ComponentsMain BodyPeripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain Body / Peripheral ComponentsPeripheral ComponentsMain BodyMain BodyMain Body / Peripheral ComponentsPeripheral ComponentsPeripheral ComponentsMain BodyMain BodyPeripheral Components-Peripheral ComponentsPeripheral ComponentsMain BodyPeripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyPeripheral ComponentsPeripheral Components
                                                                                        TypeRodsRodsSlidersRods-Sliders-Sliders-SlidersRodsRodsSliders-SlidersSlidersRodsSlidersSlidersSlidersRodsRodsRodsSliders-RodsSlidersSliders--SlidersSliders----Rods-SlidersRodsRodsSlidersSliders--
                                                                                        Stroke(mm)10 ~ 20030 ~ 5001,000 ~ 95030 ~ 800-1,000 ~ 950-1,000 ~ 3000-1,000 ~ 95030 ~ 30030 ~ 3001,000 ~ 900-1,000 ~ 300025 ~ 5030 ~ 30030 ~ 1501,000 ~ 30001,000 ~ 300030 ~ 50050 ~ 80030 ~ 8001,000 ~ 900-25 ~ 7550 ~ 15010 ~ 50--1,000 ~ 9001,000 ~ 1700-50 ~ 200--25 ~ 200-1,000 ~ 170030 ~ 50050 ~ 3001,000 ~ 8501,000 ~ 900--
                                                                                        Max. Transportable Mass Range (Horizontal)(kg)2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher-5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0-2.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.0-5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0-5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.0 / 2.1 to 5.02.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.020.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0-0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.00 to 2.0--2.1 to 5.05.1 to 10.0 / 10.1 to 20.0----2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0-5.1 to 10.0 / 10.1 to 20.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0--
                                                                                        Max. Transportable Mass (Horizontal)(kg)2.4 ~ 203 ~ 905 ~ 6518 ~ 200-10 ~ 60-5 ~ 25-10 ~ 603 ~ 9018 ~ 601 ~ 19-10 ~ 300.75 ~ 218 ~ 601 ~ 55 ~ 255 ~ 2518 ~ 6040 ~ 20018 ~ 20015 ~ 85-1 ~ 61 ~ 121--3 ~ 510 ~ 20----2.4 ~ 20-6 ~ 1118 ~ 6018 ~ 609 ~ 6520 ~ 60--
                                                                                        Max. Transportable Mass Range (Vertical)(kg)-0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher-2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0---2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0---0 to 2.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.0--5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0-0 to 2.00 to 2.0 / 2.1 to 5.00 to 2.0-----------5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0--
                                                                                        Max. Transportable Mass (Vertical)(kg)-2 ~ 530.5 ~ 238 ~ 115-4 ~ 30---4 ~ 301.5 ~ 517 ~ 44---0.25 ~ 1.57 ~ 440.25 ~ 5--8 ~ 4619 ~ 1158 ~ 1153 ~ 20-0.25 ~ 1.50.25 ~ 40.05 ~ Not vertical-----------8 ~ 467 ~ 442 ~ 238 ~ 30--
                                                                                        Drive MethodSlide ScrewsRolled Ball ScrewRolled Ball ScrewRolled Ball Screw-Rolled Ball Screw-Belts-Rolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBelts-BeltsRolled Ball ScrewRolled Ball ScrewSlide ScrewsBeltsBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball Screw-Slide ScrewsSlide ScrewsLinear Motor--BeltsBelts----Rolled Ball Screw-BeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball Screw--
                                                                                        GuideNot ProvidedNot ProvidedProvidedProvided-Provided-Provided-ProvidedProvidedProvidedProvided-ProvidedProvidedProvidedProvidedProvidedProvidedNot ProvidedNot ProvidedNot ProvidedProvided-ProvidedProvidedProvided--ProvidedProvided----Not Provided-ProvidedNot ProvidedProvidedProvidedProvided--
                                                                                        Lead(mm)2 ~ 122.5 ~ 165 ~ 302.86 ~ 20-6 ~ 30-54 equivalent-6 ~ 302.5 ~ 163 ~ 2048 ~ Equivalent to 48-27 ~ 424 ~ 103 ~ 204 ~ 1654 equivalent54 equivalent3 ~ 202.86 ~ 202.86 ~ 208 ~ 30-4 ~ 104 ~ 16---Equivalent to 48Equivalent to 48-5 ~ 16--2 ~ 12-Equivalent to 483 ~ 204 ~ 125 ~ 206 ~ 20--
                                                                                        Input Power Supply24 V DC24 V DC24 V DC---24 V DC---24 V DC-24 V DC--24 V DC-24 V DC-------24 V DC24 V DC24 V DC--24 V DC24 V DC--Single-Phase, 100 to 120 V AC ~ Single-Phase, 200 to 230 V ACSingle-Phase, 200 to 240 V AC24 V DC-24 V DC--24 V DC-Three-Phase, 200 to 230 V AC-
                                                                                        Position Detection-IncrementalIncremental--IncrementalIncremental--Incremental / AbsoluteIncremental-Incremental-Incremental / AbsoluteIncrementalIncremental / AbsoluteIncrementalIncremental / AbsoluteAbsoluteIncremental / AbsoluteIncremental / AbsoluteAbsolute--IncrementalIncrementalIncremental--IncrementalIncremental--Incremental / AbsoluteAbsolute--IncrementalIncremental / AbsoluteAbsoluteIncrementalIncremental / Absolute--
                                                                                        I/O ModuleNPN / PNP / Not ProvidedNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET-DeviceNet / Ethernet / EtherCAT / IO-Link / PROFINET-NPN / PNP-NPN / PNP-NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINET-NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP-NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET-NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET-------NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP / Not Provided-NPN / PNPNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Ethernet / Not Provided / PROFINET----NPN / PNP / Not Provided-NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET--Ethernet
                                                                                        Table Width W1(mm)--39.4 ~ 74--50 ~ 74-50 ~ 74-50 ~ 74--39.4 ~ 60-105 ~ 12919 ~ 24-32.2 ~ 6050 ~ 7450 ~ 74---105 ~ 129--32 ~ 6149--5672.4 ~ 108.7------61--39.4 ~ 7450 ~ 74--
                                                                                        BrakeNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided-Not Provided-Not Provided-Not Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / Provided-Not Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided-Not ProvidedNot Provided / ProvidedNot Provided--Not Provided / ProvidedNot Provided / Provided----Not Provided-Not Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided--
                                                                                        Max. Thrust Force Range(N)0 to 100 / 101 to 2000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More-0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000-0 to 100 / 101 to 200 / 201 to 300-0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000--0 to 100 / 101 to 200 / 201 to 3000 to 100101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 2000 to 100 / 101 to 200 / 201 to 3000 to 100 / 101 to 200 / 201 to 300101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000501 to 1000 / 1,001 or More101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000-0 to 1000 to 100 / 101 to 2000 to 100--0 to 1000 to 100 / 101 to 200----0 to 100 / 101 to 200-0 to 100 / 101 to 200101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 301 to 500 / 501 to 1000--
                                                                                        Max. Thrust Force(N)24 ~ 19630 ~ 105849 ~ 637131 ~ 3343-98 ~ 588-49 ~ 245-98 ~ 58830 ~ 1058131 ~ 736--98 ~ 29410 ~ 50131 ~ 7367.5 ~ 18049 ~ 24549 ~ 245131 ~ 736521 ~ 3343131 ~ 3343147 ~ 833-10 ~ 507.5 ~ 1802.5 ~ 6--29.4 ~ 4998 ~ 196----24 ~ 196-58.8 ~ 107.8131 ~ 736131 ~ 73688.2 ~ 637196 ~ 588--
                                                                                        Noise FiltersNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided-Not Provided-Not Provided-Not ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot ProvidedNot Provided--Not ProvidedNot Provided----Not Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided--
                                                                                        Table Length L1(mm)--72 ~ 170--102 ~ 170-102 ~ 170-102 ~ 170--72 ~ 122-160 ~ 17276.4 ~ 113.2-88.5 ~ 316.5102 ~ 170102 ~ 170---160 ~ 172--111 ~ 28560 ~ 150--64 ~ 8270 ~ 100------78--72 ~ 170102 ~ 170--
                                                                                        Usage EnvironmentStandardStandardStandardDust Resistant-Standard-Standard-StandardStandardStandardStandard-StandardStandardStandardStandard / Dust ResistantStandardStandardStandardDust ResistantDust ResistantStandard-StandardStandard / Dust ResistantStandard--StandardStandard----Standard-StandardDust ResistantStandardStandardStandard--
                                                                                        Positioning Repeatability(µm)-±20±15 ~ ±20±10 ~ ±20-±10 ~ ±20-±60-±10 ~ ±20±20±10 ~ ±20±80-±40±50±10 ~ ±20±50±60±60±10 ~ ±20±10 ~ ±20±10 ~ ±20±10 ~ ±20-±50±50±5 ~ ±90--±80±80------±80±20±20±15 ~ ±20±20--
                                                                                        Maximum Velocity(mm/sec)33 ~ 20075 ~ 5001,000 ~ 11001,000 ~ 1000-1,000 ~ 940-2000-1,000 ~ 150075 ~ 5001,000 ~ 9001,500 ~ 2000-2000 ~ 3000150 ~ 3501,000 ~ 900200 ~ 400200020001,000 ~ 10001,000 ~ 8001,000 ~ 9001,200 ~ 1800-150 ~ 350150 ~ 400400--1,000 ~ 5001,000----33 ~ 200-1,0001,000 ~ 9001,000 ~ 900250 ~ 5001,000 ~ 940--

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