SMC Single Axis Robots

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Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)

    Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

      Controller (Step Data Input Type) LECP6 (Step Motor) / LECA6 (Servo Motor) Series

        Electric actuator rod type motorless specification LEY series

          Step motor controller JXCE1, 91, P1, D1, L1 series

            Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

              Programless controller LECP1 series

                Step motor driver LECPA series

                  Electric actuator rod type LEY series AC servo motor LECS□

                    Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                      Electric slide table high rigidity type LESH series

                      • Promotional pricing

                      Electric Slide Table, Compact Type LES Series

                        Electric cylinder LZB series

                          Electric cylinder LZC series

                            Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                              Electric actuator rod type with guide motorless specification LEYG series

                                Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                  Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                    Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                    • Promotional pricing

                                    Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                      Electric actuator slider type belt drive motorless specification LEFB series

                                        Electric actuator support guide ball screw drive LEFG series

                                          Electric actuator miniature rod type LEPY series step motor (Servo 24 V DC)

                                            Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

                                              Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□

                                                Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                  Electric Actuator Guide Rod Slider Belt Drive LEL Series Step Motor

                                                    Card motor LAT3 series

                                                      Programless controller LECP2 series with stroke learning function

                                                        Electric Actuator Miniature Slide Table Type LEPS Series Step Motor

                                                          Electric actuator rod type LEY series AC servo motor LECY□

                                                            Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                              Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                AC Servo Motor Driver, Incremental Type, LECSA Series / Absolute Type

                                                                  3-axis step motor controller JXC92 series

                                                                    4-axis step motor controller JXC73 / 83/93 series

                                                                      Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                        Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                                          AC servo motor driver absolute type LECYM / LECYU series

                                                                            Electric actuator support guide belt drive LEFG series

                                                                              Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                                Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                  Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                                    Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                                      Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                                        Electric actuator support guide 11-LEFG series

                                                                                        Brand

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                                                                                        Product Series

                                                                                        Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

                                                                                        Controller (Step Data Input Type) LECP6 (Step Motor) / LECA6 (Servo Motor) Series

                                                                                        Electric actuator rod type motorless specification LEY series

                                                                                        Step motor controller JXCE1, 91, P1, D1, L1 series

                                                                                        Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

                                                                                        Programless controller LECP1 series

                                                                                        Step motor driver LECPA series

                                                                                        Electric actuator rod type LEY series AC servo motor LECS□

                                                                                        Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                                                                                        Electric slide table high rigidity type LESH series

                                                                                        Electric Slide Table, Compact Type LES Series

                                                                                        Electric cylinder LZB series

                                                                                        Electric cylinder LZC series

                                                                                        Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                                                        Electric actuator rod type with guide motorless specification LEYG series

                                                                                        Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                                                                        Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                                                                        Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                                                                        Electric actuator slider type belt drive motorless specification LEFB series

                                                                                        Electric actuator support guide ball screw drive LEFG series

                                                                                        Electric actuator miniature rod type LEPY series step motor (Servo 24 V DC)

                                                                                        Electric Actuator Slider Type Belt Drive LEFB Series Step Motor/Servo Motor

                                                                                        Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□

                                                                                        Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                                                        Electric Actuator Guide Rod Slider Belt Drive LEL Series Step Motor

                                                                                        Card motor LAT3 series

                                                                                        Programless controller LECP2 series with stroke learning function

                                                                                        Electric Actuator Miniature Slide Table Type LEPS Series Step Motor

                                                                                        Electric actuator rod type LEY series AC servo motor LECY□

                                                                                        Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                                        AC Servo Motor Driver, Incremental Type, LECSA Series / Absolute Type

                                                                                        3-axis step motor controller JXC92 series

                                                                                        4-axis step motor controller JXC73 / 83/93 series

                                                                                        Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                                        Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                                                        AC servo motor driver absolute type LECYM / LECYU series

                                                                                        Electric actuator support guide belt drive LEFG series

                                                                                        Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                                        Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                        Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                                        Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                                        Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                                        Electric actuator support guide 11-LEFG series

                                                                                        CAD
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                                                                                        Starting from

                                                                                        988.33 €

                                                                                        *Unit price with basic configuration

                                                                                        7.27 €

                                                                                        *Unit price with basic configuration

                                                                                        475.09 €

                                                                                        *Unit price with basic configuration

                                                                                        5.19 €

                                                                                        *Unit price with basic configuration

                                                                                        595.53 €

                                                                                        *Unit price with basic configuration

                                                                                        16.49 €

                                                                                        *Unit price with basic configuration

                                                                                        5.73 €

                                                                                        *Unit price with basic configuration

                                                                                        1,000.57 €

                                                                                        *Unit price with basic configuration

                                                                                        1,432.34 €

                                                                                        *Unit price with basic configuration

                                                                                        695.53 €

                                                                                        *Unit price with basic configuration

                                                                                        627.53 €

                                                                                        Special price

                                                                                        *Unit price with basic configuration

                                                                                        Promotional pricing

                                                                                        278.34 €

                                                                                        *Unit price with basic configuration

                                                                                        380.90 €

                                                                                        *Unit price with basic configuration

                                                                                        1,209.41 €

                                                                                        *Unit price with basic configuration

                                                                                        97.34 €

                                                                                        *Unit price with basic configuration

                                                                                        37.09 €

                                                                                        *Unit price with basic configuration

                                                                                        1,128.06 €

                                                                                        *Unit price with basic configuration

                                                                                        24.21 €

                                                                                        *Unit price with basic configuration

                                                                                        127.39 €

                                                                                        Special price

                                                                                        *Unit price with basic configuration

                                                                                        Promotional pricing

                                                                                        138.39 €

                                                                                        *Unit price with basic configuration

                                                                                        315.13 €

                                                                                        *Unit price with basic configuration

                                                                                        493.87 €

                                                                                        *Unit price with basic configuration

                                                                                        924.41 €

                                                                                        *Unit price with basic configuration

                                                                                        1,878.61 €

                                                                                        *Unit price with basic configuration

                                                                                        2,232.19 €

                                                                                        *Unit price with basic configuration

                                                                                        520.43 €

                                                                                        *Unit price with basic configuration

                                                                                        13.87 €

                                                                                        *Unit price with basic configuration

                                                                                        343.51 €

                                                                                        *Unit price with basic configuration

                                                                                        598.76 €

                                                                                        *Unit price with basic configuration

                                                                                        1,173.60 €

                                                                                        *Unit price with basic configuration

                                                                                        1,213.06 €

                                                                                        *Unit price with basic configuration

                                                                                        918.92 €

                                                                                        *Unit price with basic configuration

                                                                                        83.24 €

                                                                                        *Unit price with basic configuration

                                                                                        1,682.18 €

                                                                                        *Unit price with basic configuration

                                                                                        12.15 €

                                                                                        *Unit price with basic configuration

                                                                                        1,995.80 €

                                                                                        *Unit price with basic configuration

                                                                                        1,065.37 €

                                                                                        *Unit price with basic configuration

                                                                                        17.32 €

                                                                                        *Unit price with basic configuration

                                                                                        383.87 €

                                                                                        *Unit price with basic configuration

                                                                                        2,562.24 €

                                                                                        *Unit price with basic configuration

                                                                                        2,740.10 €

                                                                                        *Unit price with basic configuration

                                                                                        679.23 €

                                                                                        *Unit price with basic configuration

                                                                                        1,094.31 €

                                                                                        *Unit price with basic configuration

                                                                                        1,348.27 €

                                                                                        *Unit price with basic configuration

                                                                                        371.60 €

                                                                                        *Unit price with basic configuration

                                                                                        Min. Shipping Days : 4 Days 4 Days 9 Days 4 Days 7 Days 9 Days 12 Days 26 Days 26 Days 8 Days Same day 4 Days 26 Days 26 Days 7 Days 26 Days 26 Days 7 Days Same day 26 Days 7 Days 15 Days 4 Days 26 Days 26 Days 26 Days 17 Days 26 Days 15 Days 26 Days 26 Days 26 Days 4 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days
                                                                                        Main Body, Peripheral ComponentsMain BodyPeripheral ComponentsMain BodyPeripheral ComponentsMain BodyPeripheral ComponentsPeripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain Body / Peripheral ComponentsMain Body / Peripheral ComponentsMain BodyMain Body / Peripheral ComponentsMain Body / Peripheral ComponentsMain Body / Peripheral ComponentsPeripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyMain Body / Peripheral ComponentsPeripheral ComponentsMain BodyMain BodyMain BodyMain BodyPeripheral ComponentsPeripheral ComponentsPeripheral ComponentsMain BodyMain BodyPeripheral ComponentsPeripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyPeripheral Components
                                                                                        TypeSliders-Rods-Rods--RodsSlidersSlidersSlidersRodsRodsSlidersRodsSlidersRodsRodsSlidersSliders-RodsSlidersRodsSlidersSlidersSliders-SlidersRodsRodsSliders---SlidersRods--SlidersSlidersSlidersSlidersSliders-
                                                                                        Stroke(mm)1,000 ~ 950-30 ~ 800-30 ~ 500--30 ~ 5001,000 ~ 95050 ~ 15030 ~ 15010 ~ 20025 ~ 2001,000 ~ 300030 ~ 3001,000 ~ 90030 ~ 50030 ~ 3001,000 ~ 9501,000 ~ 3000-25 ~ 751,000 ~ 90050 ~ 8001,000 ~ 30001,000 ~ 90010 ~ 50-25 ~ 5030 ~ 80030 ~ 3001,000 ~ 850---1,000 ~ 300030 ~ 500--1,000 ~ 9001,000 ~ 9001,000 ~ 17001,000 ~ 17001,000 ~ 900-
                                                                                        Max. Transportable Mass Range (Horizontal)(kg)2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0-10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher-2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0--10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.00 to 2.0 / 2.1 to 5.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.0-0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.020.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.00 to 2.0-0 to 2.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0---2.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0--10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.010.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0-
                                                                                        Max. Transportable Mass (Horizontal)(kg)5 ~ 65-18 ~ 200-3 ~ 90--18 ~ 6010 ~ 601 ~ 121 ~ 52.4 ~ 202.4 ~ 205 ~ 2518 ~ 6015 ~ 8518 ~ 603 ~ 9010 ~ 605 ~ 25-1 ~ 61 ~ 1940 ~ 20010 ~ 303 ~ 51-0.75 ~ 218 ~ 20018 ~ 609 ~ 65---5 ~ 257 ~ 80--15 ~ 8515 ~ 856 ~ 1110 ~ 2020 ~ 60-
                                                                                        Max. Transportable Mass Range (Vertical)(kg)0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher-0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0--5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.00 to 2.0 / 2.1 to 5.0---5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0--0 to 2.0-10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher--0 to 2.0-0 to 2.05.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0----0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0--2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0--5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0-
                                                                                        Max. Transportable Mass (Vertical)(kg)0.5 ~ 23-8 ~ 115-2 ~ 53--8 ~ 464 ~ 300.25 ~ 40.25 ~ 5---7 ~ 443 ~ 208 ~ 461.5 ~ 514 ~ 30--0.25 ~ 1.5-19 ~ 115--0.05 ~ Not vertical-0.25 ~ 1.58 ~ 1157 ~ 442 ~ 23----2 ~ 42--3 ~ 203 ~ 20--8 ~ 30-
                                                                                        Drive MethodRolled Ball Screw-Rolled Ball Screw-Rolled Ball Screw--Rolled Ball ScrewRolled Ball ScrewSlide ScrewsSlide ScrewsSlide ScrewsRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBelts-Slide ScrewsBeltsRolled Ball ScrewBeltsBeltsLinear Motor-Rolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball Screw---BeltsRolled Ball Screw--Rolled Ball ScrewRolled Ball ScrewBeltsBeltsRolled Ball Screw-
                                                                                        GuideProvided-Provided-Not Provided--Not ProvidedProvidedProvidedProvidedNot ProvidedNot ProvidedProvidedProvidedProvidedNot ProvidedProvidedProvidedProvided-ProvidedProvidedNot ProvidedProvidedProvidedProvided-ProvidedNot ProvidedProvidedProvided---ProvidedNot Provided--ProvidedProvidedProvidedProvidedProvided-
                                                                                        Lead(mm)5 ~ 30-2.86 ~ 20-2.5 ~ 16--3 ~ 206 ~ 304 ~ 164 ~ 162 ~ 122 ~ 1254 equivalent3 ~ 208 ~ 303 ~ 202.5 ~ 166 ~ 3054 equivalent-4 ~ 1048 ~ Equivalent to 482.86 ~ 2027 ~ 42Equivalent to 48--4 ~ 102.86 ~ 203 ~ 205 ~ 20---54 equivalent3 ~ 16--8 ~ 308 ~ 30Equivalent to 48Equivalent to 486 ~ 20-
                                                                                        Input Power Supply24 V DC24 V DC--24 V DC----24 V DC24 V DC24 V DC24 V DC----24 V DC---24 V DC24 V DC--24 V DC24 V DC-24 V DC--24 V DCSingle-Phase, 100 to 120 V AC ~ Single-Phase, 200 to 230 V AC---24 V DCThree-Phase, 200 to 230 V AC---24 V DC24 V DC--
                                                                                        Position DetectionIncrementalIncremental--Incremental--Incremental / AbsoluteIncremental / AbsoluteIncrementalIncremental--Incremental / Absolute--Incremental / AbsoluteIncrementalIncremental--IncrementalIncrementalIncremental / AbsoluteIncremental / AbsoluteIncrementalIncremental-IncrementalAbsoluteIncremental / AbsoluteIncrementalIncremental / Absolute--AbsoluteIncremental--Incremental / AbsoluteAbsoluteIncrementalIncrementalIncremental / Absolute-
                                                                                        I/O ModuleNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP-DeviceNet / Ethernet / EtherCAT / IO-Link / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNPNPN / PNP--NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP / Not ProvidedNPN / PNP / Not Provided----NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINET---NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Not ProvidedNPN / PNPNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET-Ethernet--PNP / DeviceNet / Ethernet / Not Provided / PROFINET----NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Ethernet / Not Provided / PROFINET--
                                                                                        Table Width W1(mm)39.4 ~ 74-------50 ~ 7432 ~ 6132.2 ~ 60--50 ~ 74-105 ~ 129--50 ~ 7450 ~ 74--39.4 ~ 60-105 ~ 1295649-19 ~ 24--39.4 ~ 74---50 ~ 74---105 ~ 129105 ~ 1296172.4 ~ 108.750 ~ 74-
                                                                                        BrakeNot Provided / Provided-Not Provided-Not Provided / Provided--Not Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided-Not ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided-Not ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided---Not Provided / ProvidedNot Provided / Provided--Not Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided-
                                                                                        Max. Thrust Force Range(N)0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000-101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More-0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More--101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 2000 to 100 / 101 to 2000 to 100 / 101 to 2000 to 100 / 101 to 2000 to 100 / 101 to 200 / 201 to 300101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300-0 to 100-501 to 1000 / 1,001 or More0 to 100 / 101 to 200 / 201 to 3000 to 1000 to 100-0 to 100101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000---0 to 100 / 101 to 200 / 201 to 3000 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000--101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000101 to 200 / 201 to 300 / 301 to 500 / 501 to 10000 to 100 / 101 to 2000 to 100 / 101 to 200101 to 200 / 301 to 500 / 501 to 1000-
                                                                                        Max. Thrust Force(N)49 ~ 637-131 ~ 3343-30 ~ 1058--131 ~ 73698 ~ 5887.5 ~ 1807.5 ~ 18024 ~ 19624 ~ 19649 ~ 245131 ~ 736147 ~ 833131 ~ 73630 ~ 105898 ~ 58849 ~ 245-10 ~ 50-521 ~ 334398 ~ 29429.4 ~ 492.5 ~ 6-10 ~ 50131 ~ 3343131 ~ 73688.2 ~ 637---49 ~ 24535 ~ 707--147 ~ 833147 ~ 83358.8 ~ 107.898 ~ 196196 ~ 588-
                                                                                        Noise FiltersNot Provided / Provided-Not Provided-Not Provided--Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot ProvidedNot ProvidedNot Provided---Not ProvidedNot Provided--Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-
                                                                                        Table Length L1(mm)72 ~ 170-------102 ~ 170111 ~ 28588.5 ~ 316.5--102 ~ 170-160 ~ 172--102 ~ 170102 ~ 170--72 ~ 122-160 ~ 17264 ~ 8260 ~ 150-76.4 ~ 113.2--72 ~ 170---102 ~ 170---160 ~ 172160 ~ 1727870 ~ 100102 ~ 170-
                                                                                        Usage EnvironmentStandard-Dust Resistant-Standard--StandardStandardStandard / Dust ResistantStandard / Dust ResistantStandardStandardStandardStandardStandardDust ResistantStandardStandardStandard-StandardStandardDust ResistantStandardStandardStandard-StandardDust ResistantStandardStandard---StandardStandard / Dust Resistant--StandardStandardStandardStandardStandard-
                                                                                        Positioning Repeatability(µm)±15 ~ ±20-±10 ~ ±20-±20--±10 ~ ±20±10 ~ ±20±50±50--±60±10 ~ ±20±10 ~ ±20±20±20±10 ~ ±20±60-±50±80±10 ~ ±20±40±80±5 ~ ±90-±50±10 ~ ±20±10 ~ ±20±15 ~ ±20---±60±20--±10 ~ ±20±10 ~ ±20±80±80±20-
                                                                                        Maximum Velocity(mm/sec)1,000 ~ 1100-1,000 ~ 1000-75 ~ 500--1,000 ~ 10001,000 ~ 1500150 ~ 400200 ~ 40033 ~ 20033 ~ 20020001,000 ~ 9001,200 ~ 18001,000 ~ 90075 ~ 5001,000 ~ 9402000-150 ~ 3501,500 ~ 20001,000 ~ 8002000 ~ 30001,000 ~ 500400-150 ~ 3501,000 ~ 9001,000 ~ 900250 ~ 500---2000100 ~ 400--1,200 ~ 18001,200 ~ 18001,0001,0001,000 ~ 940-

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