SMC Single Axis Robots（Position Detection：Absolute）

Data to be displayed: 30; 45; 60

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?* Information on days to ship and prices

Electric actuator rod type LEY series AC servo motor LECS□

SMC

[Features]
·High-Power Motor (100W/200W)
·Improved high-speed transport capacity
·Supports high acceleration / deceleration (5,000 mm/s2)
·Equipped with absolute encoder

2D / 3D CAD data available

Starting from^∗ ：	1,131.84 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator rod type LEY series AC servo motor LECY□

SMC

[Features]
·High-Power Motor (100W/200W/400W)
·Improved high-speed transport capacity
·Supports high acceleration / deceleration (5,000 mm/s2)
·Equipped with absolute encoder

2D / 3D CAD data available

Starting from^∗ ：	1,173.60 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

SMC

[Features]
·Easy to install the main body / reduce installation man-hours
The main body can be installed without removing exterior parts such as covers.
·Table position can be detected by auto switch
·Up to 4 locations can be attached to both sides of the body
·Ball screw drive

2D / 3D CAD data available

Starting from^∗ ：	1,604.24 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator slider type belt drive LEFB series AC servo motor LECY□

SMC

2D / 3D CAD data available

Starting from^∗ ：	1,995.80 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

SMC

[Features]
·Thin low center of gravity
·High precision / high rigidity
·Reduction of installation man-hours
·Weight reduced by about 37%
·No interference with the workpiece motor
·Belt drive

2D / 3D CAD data available

Starting from^∗ ：	2,358.53 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator guided rod type LEYG series AC servo motor LECS□

SMC

[Features]
·The guide rod is compactly integrated to achieve lateral load resistance and high-precision detent.
·Tip lateral load: 5 times (Comparison of rod type, size 25, 100 strokes)
·Compatible with plain bearings and ball bush bearings
·Pressing control can be switched
Can be held with the rod pressed against the work, etc.

2D / 3D CAD data available

Starting from^∗ ：	1,353.86 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator slider type belt drive LEFB series AC servo motor LECS□

SMC

2D / 3D CAD data available

Starting from^∗ ：	1,209.41 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□

SMC

[Features]
·Protective Enclosure: IP65 equivalent (Option selection)
·Supports up to 800 mm stroke

2D / 3D CAD data available

Starting from^∗ ：	2,004.99 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

SMC

[Features]
·Protective Enclosure: IP65 equivalent
·Supports up to 500 mm stroke

2D / 3D CAD data available

Starting from^∗ ：	1,303.53 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

AC Servo Motor Driver, Incremental Type, LECSA Series / Absolute Type

SMC

An electric actuator with display setting functionality.
[Features]
· Pulse input type motor driver.
· Supported motor capacities: 100 W, 200 W, 400 W.
· Compatible encoders: incremental type and absolute type.
· Servo adjustment using auto gain tuning.

2D / 3D CAD data available

Starting from^∗ ：	988.47 €
Min. Shipping Days ：	4 Days

*Unit price with basic configuration

Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

SMC

Vacuum suction from the vacuum port suppresses dust generation from the ball screw and guide to the outside.
[Features]
·Built-in vacuum piping
·The main body can be installed without removing exterior parts such as covers.
·Body body linear guide specifications

2D / 3D CAD data available

Starting from^∗ ：	1,546.47 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

SMC

[Features]
·Thin low center of gravity
·High precision / high rigidity
·Reduction of installation man-hours
·Weight reduced by about 37%
·No interference with the workpiece motor
·Ball screw drive

2D / 3D CAD data available

Starting from^∗ ：	2,697.30 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

SMC

[Features]
·Thin low center of gravity
·High precision / high rigidity
·Reduction of installation man-hours
·Weight reduced by about 37%
·No interference with the workpiece motor
·Belt drive

Starting from^∗ ：	2,392.26 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric Actuator, High Stiffness Slider Type, Ball Screw Drive, 11-LEJS Series, LECS□

SMC

2D / 3D CAD data available

Starting from^∗ ：	2,982.85 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

AC Servo Motor Driver, Absolute Type LECSS-T Series

SMC

A pulse input type AC servo motor driver.
[Features]
· Supported motor capacities: 100 W, 200 W, 400 W.
· Compatible encoders: absolute type.
· Servo adjustment using auto gain tuning.
· With display setting functionality.
· STO (Safe Torque Off) safety function available.
· Bidirectional communication speed: 3 times.
· Improved noise resistance.

2D / 3D CAD data available

Starting from^∗ ：	1,124.51 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

SMC

[Features]
·Easy to install the main body / reduce installation man-hours
·The main body can be installed without removing exterior parts such as covers.
·Table position can be detected by auto switch
·Up to 4 locations can be attached to both sides of the body
·Ball screw drive

2D / 3D CAD data available

Starting from^∗ ：	1,513.19 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

SMC

Starting from^∗ ：	2,740.10 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration

Electric actuator rod type with guide LEYG series AC servo motor LECY□

SMC

Starting from^∗ ：	1,570.63 €
Min. Shipping Days ：	26 Days

*Unit price with basic configuration


Brand
Product Series
CAD
Starting from^∗
Min. Shipping Days ：
Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)


Brand	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC	SMC
Product Series	Electric actuator rod type LEY series AC servo motor LECS□	Electric actuator rod type LEY series AC servo motor LECY□	Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□	Electric actuator slider type belt drive LEFB series AC servo motor LECY□	Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□	Electric actuator guided rod type LEYG series AC servo motor LECS□	Electric actuator slider type belt drive LEFB series AC servo motor LECS□	Electric actuator rod type dust-proof and drip-proof specification LEY series AC servo motor LECS□	Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□	AC Servo Motor Driver, Incremental Type, LECSA Series / Absolute Type	Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□	Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□	Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□	Electric Actuator, High Stiffness Slider Type, Ball Screw Drive, 11-LEJS Series, LECS□	AC Servo Motor Driver, Absolute Type LECSS-T Series	Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□	Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□	Electric actuator rod type with guide LEYG series AC servo motor LECY□
CAD	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D	2D / 3D		2D / 3D	2D / 3D	2D / 3D
Starting from^∗	1,131.84 € *Unit price with basic configuration	1,173.60 € *Unit price with basic configuration	1,604.24 € *Unit price with basic configuration	1,995.80 € *Unit price with basic configuration	2,358.53 € *Unit price with basic configuration	1,353.86 € *Unit price with basic configuration	1,209.41 € *Unit price with basic configuration	2,004.99 € *Unit price with basic configuration	1,303.53 € *Unit price with basic configuration	988.47 € *Unit price with basic configuration	1,546.47 € *Unit price with basic configuration	2,697.30 € *Unit price with basic configuration	2,392.26 € *Unit price with basic configuration	2,982.85 € *Unit price with basic configuration	1,124.51 € *Unit price with basic configuration	1,513.19 € *Unit price with basic configuration	2,740.10 € *Unit price with basic configuration	1,570.63 € *Unit price with basic configuration
Min. Shipping Days ：	26 Days	26 Days	26 Days	26 Days	26 Days	26 Days	26 Days	26 Days	26 Days	4 Days	26 Days	26 Days	26 Days	26 Days	26 Days	26 Days	26 Days	26 Days
Main Body, Peripheral Components	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Main Body	Peripheral Components	Main Body	Main Body	Main Body	Main Body	Peripheral Components	Main Body	Main Body	Main Body
Type	Rods	Rods	Sliders	Sliders	Sliders	Rods	Sliders	Rods	Rods	-	Sliders	Sliders	Sliders	Sliders	-	Sliders	Sliders	Rods
Stroke(mm)	30 ～ 500	30 ～ 800	1,000 ～ 900	1,000 ～ 3000	1,000 ～ 3000	30 ～ 300	1,000 ～ 3000	50 ～ 800	30 ～ 500	-	100 ～ 900	1,000 ～ 900	1,000 ～ 3000	1,200 ～ 700	-	1,000 ～ 900	1,000 ～ 900	50 ～ 300
Max. Transportable Mass Range (Horizontal)(kg)	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	2.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	2.1 to 5.0 / 10.1 to 20.0 / 20.1 to 50.0	20.1 to 50.0 / 50.1 to 100.0 / 150.1 or Higher	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	-	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	20.1 to 50.0 / 50.1 to 100.0	-	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0
Max. Transportable Mass (Horizontal)(kg)	18 ～ 60	18 ～ 200	10 ～ 60	5 ～ 25	10 ～ 30	18 ～ 60	5 ～ 25	40 ～ 200	18 ～ 60	-	20 ～ 60	15 ～ 85	10 ～ 30	45 ～ 85	-	10 ～ 60	15 ～ 85	18 ～ 60
Max. Transportable Mass Range (Vertical)(kg)	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	-	-	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	-	10.1 to 20.0 / 20.1 to 50.0 / 50.1 to 100.0 / 100.1 or Higher	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	-	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0	-	5.1 to 10.0 / 10.1 to 20.0	-	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0	2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.0	5.1 to 10.0 / 10.1 to 20.0 / 20.1 to 50.0
Max. Transportable Mass (Vertical)(kg)	8 ～ 46	8 ～ 115	4 ～ 30	-	-	7 ～ 44	-	19 ～ 115	8 ～ 37	-	8 ～ 30	3 ～ 20	-	10 ～ 20	-	4 ～ 30	3 ～ 20	7 ～ 44
Drive Method	Rolled Ball Screw	Rolled Ball Screw	Rolled Ball Screw	Belts	Belts	Rolled Ball Screw	Belts	Rolled Ball Screw	Rolled Ball Screw	-	Rolled Ball Screw	Rolled Ball Screw	Belts	Rolled Ball Screw	-	Rolled Ball Screw	Rolled Ball Screw	Rolled Ball Screw
Guide	Not Provided	Not Provided	Provided	Provided	Provided	Provided	Provided	Not Provided	Not Provided	-	Provided	Provided	Provided	Provided	-	Provided	Provided	Provided
Lead(mm)	3 ～ 20	2.86 ～ 20	6 ～ 30	54 equivalent	27 ～ 42	3 ～ 20	54 equivalent	2.86 ～ 20	3 ～ 20	-	6 ～ 20	8 ～ 30	27 ～ 42	8 ～ 20	-	6 ～ 30	8 ～ 30	4 ～ 12
Input Power Supply	-	-	-	-	-	-	-	-	-	Single-Phase, 200 to 230 V AC	-	-	-	-	Single-Phase, 200 to 240 V AC	-	-	-
Position Detection	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute	Absolute
I/O Module	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-
Table Width W1(mm)	-	-	50 ～ 74	50 ～ 74	105 ～ 129	-	50 ～ 74	-	-	-	50 ～ 74	105 ～ 129	105 ～ 129	105 ～ 129	-	50 ～ 74	105 ～ 129	-
Brake	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	-	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided	-	Not Provided / Provided	Not Provided / Provided	Not Provided / Provided
Max. Thrust Force Range(N)	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000 / 1,001 or More	0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	0 to 100 / 101 to 200 / 201 to 300	0 to 100 / 101 to 200 / 201 to 300	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	0 to 100 / 101 to 200 / 201 to 300	501 to 1000 / 1,001 or More	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	-	101 to 200 / 301 to 500 / 501 to 1000	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	0 to 100 / 101 to 200 / 201 to 300	301 to 500 / 501 to 1000	-	0 to 100 / 101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	101 to 200 / 201 to 300 / 301 to 500 / 501 to 1000	101 to 200 / 301 to 500 / 501 to 1000
Max. Thrust Force(N)	131 ～ 736	131 ～ 3343	98 ～ 588	49 ～ 245	98 ～ 294	131 ～ 736	49 ～ 245	521 ～ 3343	131 ～ 588	-	196 ～ 588	147 ～ 833	98 ～ 294	441 ～ 833	-	98 ～ 588	147 ～ 833	131 ～ 736
Noise Filters	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	Not Provided	-	Not Provided	Not Provided	Not Provided	Not Provided	-	Not Provided	Not Provided	Not Provided
Table Length L1(mm)	-	-	102 ～ 170	102 ～ 170	160 ～ 172	-	102 ～ 170	-	-	-	102 ～ 170	160 ～ 172	160 ～ 172	160 ～ 172	-	102 ～ 170	160 ～ 172	-
Usage Environment	Standard	Dust Resistant	Standard	Standard	Standard	Standard	Standard	Dust Resistant	Dust Resistant	-	Standard	Standard	Standard	Standard	-	Standard	Standard	Standard
Positioning Repeatability(µm)	±10 ～ ±20	±10 ～ ±20	±10 ～ ±20	±60	±40	±10 ～ ±20	±60	±10 ～ ±20	±20	-	±20	±10 ～ ±20	±40	±10 ～ ±20	-	±10 ～ ±20	±10 ～ ±20	±20
Maximum Velocity(mm/sec)	1,000 ～ 900	1,000 ～ 900	1,000 ～ 1500	2000	2000 ～ 3000	1,000 ～ 900	2000	1,000 ～ 800	1,200 ～ 900	-	1,000 ～ 900	1,200 ～ 1800	2000 ～ 3000	1,200 ～ 600	-	1,000 ～ 940	1,200 ～ 1800	1,000 ～ 900

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Main Body, Peripheral Components
- Main Body
- Peripheral Components
Clear

Type
- Sliders
- Rods
Enlarge image

Clear

Stroke(mm)
1,000

1,100

1,200

1,500

1,800

2,000

10

15

20

25

30

40

50

60

70

75

80

100

120

125

150

200

250

300

350

400

450

500

550

600

650

700

750

800

850

900

950

1000

1050

1100

1150

1200

1250

1300

1350

1400

1450

1500

1550

1600

1650

1700

1750

1800

1850

1900

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2100

2150

2200

2250

2300

2350

2400

2450

2500

2550

2600

2650

2700

2750

2800

2850

2900

2950

3000

3050
Clear

Max. Transportable Mass Range (Horizontal)(kg)
- 0 to 2.0
- 2.1 to 5.0
- 5.1 to 10.0
- 10.1 to 20.0
- 20.1 to 50.0
- 50.1 to 100.0
- 150.1 or Higher
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.

Clear

Max. Transportable Mass (Horizontal)(kg)
0.75

1

1.5

2

2.4

2.5

3

4

4.4

5

6

7

7.3

7.5

8

8.2

9

10

11

11.9

12

14

15

17

18

19

20

23

25

30

35

40

45

50

55

60

65

70

80

85

90

200
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.
Clear

Max. Transportable Mass Range (Vertical)(kg)
- 0 to 2.0
- 2.1 to 5.0
- 5.1 to 10.0
- 10.1 to 20.0
- 20.1 to 50.0
- 50.1 to 100.0
- 100.1 or Higher
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.

Clear

Max. Transportable Mass (Vertical)(kg)
0.05

0.1

0.25

0.5

1

1.5

2

2.5

3

3.5

4

4.5

5

6

7

7.5

8

8.5

9

10

11

12

12.5

13

14

15

16

17

18.5

19

20

21

22

23

24

25

27

28.5

29

30

35

37

38

41

42

43

44

46

50

51

53

72

115

Not vertical
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.
Clear

Drive Method
- Rolled Ball Screw
- Belts
- Slide Screws
- Linear Motor
Images

Clear

Guide
- Not Provided
- Provided
Images

Clear

Lead(mm)
2

2.5

2.86

3

4

5

6

8

10

12

16

20

24

25 Equivalent

27

30

42

48

Equivalent to 48

54 equivalent
Clear

Input Power Supply
24 V DC

24/48 V DC

Single-Phase, 100 to 115 V AC

Single-Phase, 100 to 120 V AC

Single-Phase, 200 to 230 V AC

Three-Phase, 200 to 230 V AC

Single-Phase, 200 to 240 V AC
Clear

Position Detection
- Incremental
- Absolute
Details

Clear

I/O Module
- NPN
- PNP
- CC-Link
- DeviceNet
- Ethernet
- Not Provided
- EtherCAT
- IO-Link
- PROFINET
Clear

Table Width W1(mm)
19

24

25

32

32.2

36

39.4

40.2

41

45

47

49

50

50.4

52

54

56

60

61

64

71.7

72.4

74

80

87

87.4

94

100

105

108.7

110

124.7

129

135

146
Drawing

Clear

Brake
- Not Provided
- Provided
Clear

Max. Thrust Force Range(N)
- 0 to 100
- 101 to 200
- 201 to 300
- 301 to 500
- 501 to 1000
- 1,001 or More
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.

Clear

Max. Thrust Force(N)
2.5

5.2

5.5

6

7.5

10

11

15

20

24

25

27

29.4

30

35

36

38

40

43

45

49

50

55

56

58

58.8

60

62

68.6

70

72

74

75

80

84

86

88.2

90

98

100

107.8

111

117

117.6

120

122

125

130

131

137.2

140

141

147

150

157

169

176.4

180

189

196

197

200

238

245

250

255

283

294

300

308

339

360

370

385

392

400

441

452

485

490

500

521

539

550

553

588

600

637

707

736

833

900

1012

1058

1910

3343
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.
Clear

Noise Filters
- Not Provided
- Provided
Clear

Table Length L1(mm)
45

58

60

64

65

70

72

76.4

78

80

82

86

88.2

88.5

88.7

90

100

102

102.3

102.5

107.4

108

111

113.2

116.5

120

122

130.3

130.5

131.5

131.7

133.5

137

143

150

154

156.5

156.7

159.5

160

170

172

174.3

174.5

191.5

193.5

199.3

199.5

207

266.5

285

291.5

316.5
Drawing

Clear

Usage Environment
- Standard
- Dust Resistant
Clear

Positioning Repeatability(µm)
±5

±10

±15

±20

±40

±50

±60

±80

±90
Clear

Maximum Velocity(mm/sec)
1,000

1,140

1,200

1,410

1,500

3,000

33

50

70

75

80

100

125

130

150

160

170

175

180

190

200

210

220

225

230

240

250

260

270

300

310

320

330

340

350

360

370

380

390

400

410

420

440

450

460

470

480

500

510

520

540

550

570

580

600

610

620

630

640

650

660

700

720

740

750

760

780

800

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910

930

940

1000

1050

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1110

1170

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1390

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1875

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3000
Clear