Single Axis Robots(Max. Thrust Force Range:101 to 200)

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Brand
Product Series
CAD
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Min. Shipping Days
Main Body, Peripheral Components
Type
Stroke(mm)
Max. Transportable Mass Range (Horizontal)(kg)
Max. Transportable Mass (Horizontal)(kg)
Max. Transportable Mass Range (Vertical)(kg)
Max. Transportable Mass (Vertical)(kg)
Drive Method
Guide
Lead(mm)
Input Power Supply
Position Detection
I/O Module
Table Width W1(mm)
Brake
Max. Thrust Force Range(N)
Max. Thrust Force(N)
Noise Filters
Table Length L1(mm)
Usage Environment
Positioning Repeatability(µm)
Maximum Velocity(mm/sec)

    Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

      Electric actuator rod type motorless specification LEY series

        Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

          Electric actuator rod type LEY series AC servo motor LECS□

            Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

              Electric slide table high rigidity type LESH series

              • Promotional pricing

              Electric Slide Table, Compact Type LES Series

                Electric cylinder LZB series

                  Electric cylinder LZC series

                    Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                      Electric actuator rod type with guide motorless specification LEYG series

                        Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                          Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                            Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                            • Promotional pricing

                            Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                              Electric actuator slider type belt drive motorless specification LEFB series

                                Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                  Electric Cylinder, EAC Series

                                    Single Axis Robots RS1 / Linear

                                      Electric actuator rod type LEY series AC servo motor LECY□

                                        Electric actuator guided rod type LEYG series AC servo motor LECS□

                                          Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                            Single Axis Robot RSH1

                                              Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                  Electric Slider, EAS Series

                                                    Single Axis Robots RS3 / Linear

                                                      Single Axis Robots RS3 Motor Wrap

                                                        Rod Type with Support Guide

                                                          Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                            Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                              Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                  Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                    Electric Slider, EZS Series

                                                                      Single Axis Robot RSH2

                                                                        Single Axis Robot RSH3

                                                                          Single Axis Robots RS1 / Motor Wrap

                                                                            Single Axis Robots RSD2 / Rod Type

                                                                              Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                                Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                                  Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                                                                    Electric actuator rod type with guide LEYG series AC servo motor LECY□

                                                                                    Brand

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    ORIENTAL MOTOR

                                                                                    MISUMI

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    MISUMI

                                                                                    SMC

                                                                                    SMC

                                                                                    ORIENTAL MOTOR

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    ORIENTAL MOTOR

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    MISUMI

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    SMC

                                                                                    Product Series

                                                                                    Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor

                                                                                    Electric actuator rod type motorless specification LEY series

                                                                                    Electric Actuator Rod Type LEY Series Step Motor/Servo Motor

                                                                                    Electric actuator rod type LEY series AC servo motor LECS□

                                                                                    Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□

                                                                                    Electric slide table high rigidity type LESH series

                                                                                    Electric Slide Table, Compact Type LES Series

                                                                                    Electric cylinder LZB series

                                                                                    Electric cylinder LZC series

                                                                                    Electric actuator slider type belt drive LEFB series AC servo motor LECS□

                                                                                    Electric actuator rod type with guide motorless specification LEYG series

                                                                                    Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series

                                                                                    Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□

                                                                                    Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor

                                                                                    Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series

                                                                                    Electric actuator slider type belt drive motorless specification LEFB series

                                                                                    Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□

                                                                                    Electric Cylinder, EAC Series

                                                                                    Single Axis Robots RS1 / Linear

                                                                                    Electric actuator rod type LEY series AC servo motor LECY□

                                                                                    Electric actuator guided rod type LEYG series AC servo motor LECS□

                                                                                    Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series

                                                                                    Single Axis Robot RSH1

                                                                                    Electric actuator slider type belt drive LEFB series AC servo motor LECY□

                                                                                    Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series

                                                                                    Electric Slider, EAS Series

                                                                                    Single Axis Robots RS3 / Linear

                                                                                    Single Axis Robots RS3 Motor Wrap

                                                                                    Rod Type with Support Guide

                                                                                    Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□

                                                                                    Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□

                                                                                    Electric Actuator, Low Profile Slider Type, Basic Type, LEMB Series, Step Motor

                                                                                    Electric Actuator Low Profile Slider Type, Cam Follower Guide Type, LEMC Series Step Motor

                                                                                    Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series, LECS□

                                                                                    Electric Slider, EZS Series

                                                                                    Single Axis Robot RSH2

                                                                                    Single Axis Robot RSH3

                                                                                    Single Axis Robots RS1 / Motor Wrap

                                                                                    Single Axis Robots RSD2 / Rod Type

                                                                                    Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□

                                                                                    Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□

                                                                                    Electric Actuator, Low Profile Slider Type, Linear Guide 1-Axis/2-Axis, LEMH/LEMHT Series

                                                                                    Electric actuator rod type with guide LEYG series AC servo motor LECY□

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                                                                                    Starting from

                                                                                    1,357.93 €

                                                                                    *Unit price with basic configuration

                                                                                    560.14 €

                                                                                    *Unit price with basic configuration

                                                                                    595.53 €

                                                                                    *Unit price with basic configuration

                                                                                    1,000.57 €

                                                                                    *Unit price with basic configuration

                                                                                    1,432.34 €

                                                                                    *Unit price with basic configuration

                                                                                    927.37 €

                                                                                    *Unit price with basic configuration

                                                                                    871.80 €

                                                                                    Special price

                                                                                    *Unit price with basic configuration

                                                                                    Promotional pricing

                                                                                    495.89 €

                                                                                    *Unit price with basic configuration

                                                                                    546.19 €

                                                                                    *Unit price with basic configuration

                                                                                    2,028.77 €

                                                                                    *Unit price with basic configuration

                                                                                    768.09 €

                                                                                    *Unit price with basic configuration

                                                                                    2,145.69 €

                                                                                    *Unit price with basic configuration

                                                                                    1,296.96 €

                                                                                    *Unit price with basic configuration

                                                                                    760.19 €

                                                                                    *Unit price with basic configuration

                                                                                    968.29 €

                                                                                    Special price

                                                                                    *Unit price with basic configuration

                                                                                    Promotional pricing

                                                                                    1,485.56 €

                                                                                    *Unit price with basic configuration

                                                                                    2,232.19 €

                                                                                    *Unit price with basic configuration

                                                                                    532.55 €

                                                                                    *Unit price with basic configuration

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                                                                                    1,181.27 €

                                                                                    *Unit price with basic configuration

                                                                                    1,213.06 €

                                                                                    *Unit price with basic configuration

                                                                                    1,091.16 €

                                                                                    *Unit price with basic configuration

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                                                                                    2,602.01 €

                                                                                    *Unit price with basic configuration

                                                                                    1,065.37 €

                                                                                    *Unit price with basic configuration

                                                                                    679.95 €

                                                                                    *Unit price with basic configuration

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                                                                                    2,814.41 €

                                                                                    *Unit price with basic configuration

                                                                                    2,841.41 €

                                                                                    *Unit price with basic configuration

                                                                                    688.44 €

                                                                                    *Unit price with basic configuration

                                                                                    1,282.18 €

                                                                                    *Unit price with basic configuration

                                                                                    1,348.27 €

                                                                                    *Unit price with basic configuration

                                                                                    681.97 €

                                                                                    *Unit price with basic configuration

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                                                                                    1,513.19 €

                                                                                    *Unit price with basic configuration

                                                                                    2,392.26 €

                                                                                    *Unit price with basic configuration

                                                                                    1,567.53 €

                                                                                    *Unit price with basic configuration

                                                                                    1,570.63 €

                                                                                    *Unit price with basic configuration

                                                                                    Min. Shipping Days 7 Days 9 Days 7 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 26 Days 9 Days 26 Days 26 Days 7 Days 9 Days 26 Days 26 Days 18 Days 14 Days 26 Days 26 Days 26 Days 19 Days 26 Days 26 Days 18 Days 14 Days 14 Days 14 Days 26 Days 26 Days 26 Days 26 Days 26 Days 18 Days 19 Days 19 Days 14 Days 14 Days 26 Days 26 Days 26 Days 26 Days
                                                                                    Main Body, Peripheral ComponentsMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain BodyMain Body
                                                                                    TypeSlidersRodsRodsRodsSlidersSlidersSlidersRodsRodsSlidersRodsSlidersRodsRodsSlidersSlidersSlidersSlidersSlidersRodsRodsSlidersSlidersSlidersRodsSlidersSlidersSlidersRodsSlidersSlidersSlidersSlidersSlidersSlidersSlidersSlidersSlidersRodsSlidersSlidersSlidersRods
                                                                                    Stroke(mm)1,000 ~ 95030 ~ 50030 ~ 50030 ~ 50050 ~ 75050 ~ 15030 ~ 15025 ~ 20025 ~ 2001,000 ~ 250030 ~ 3001,000 ~ 90050 ~ 40030 ~ 30050 ~ 8001,000 ~ 25001,000 ~ 90050 ~ 30050 ~ 40030 ~ 50030 ~ 30050 ~ 600150 ~ 8001,000 ~ 250030 ~ 50050 ~ 85050 ~ 80050 ~ 80050 ~ 3001,200 ~ 800200 ~ 4001,000 ~ 17001,000 ~ 1700100 ~ 50050 ~ 850150 ~ 1050150 ~ 105050 ~ 40050 ~ 30050 ~ 7001,000 ~ 8001,000 ~ 140050 ~ 300
                                                                                    Max. Transportable Mass Range (Horizontal)(kg)10.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.010.1 to 20.010.1 to 20.02.1 to 5.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.010.1 to 20.010.1 to 20.010.1 to 20.020.1 to 50.05.1 to 10.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.010.1 to 20.0 / 20.1 to 50.010.1 to 20.010.1 to 20.020.1 to 50.020.1 to 50.010.1 to 20.010.1 to 20.020.1 to 50.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.020.1 to 50.020.1 to 50.050.1 to 100.05.1 to 10.020.1 to 50.010.1 to 20.010.1 to 20.010.1 to 20.010.1 to 20.0 / 20.1 to 50.0
                                                                                    Max. Transportable Mass (Horizontal)(kg)11 ~ 2018 ~ 3012 ~ 4018 ~ 302012511.9 ~ 2011.9 ~ 201518 ~ 301518 ~ 3012 ~ 40201520-618 ~ 3018 ~ 3011 ~ 30201530 ~ 40-121225 ~ 401515112020-406062520202018 ~ 60
                                                                                    Max. Transportable Mass Range (Vertical)(kg)0 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.02.1 to 5.02.1 to 5.0---5.1 to 10.02.1 to 5.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.05.1 to 10.0 / 10.1 to 20.0--10.1 to 20.02.1 to 5.05.1 to 10.05.1 to 10.00 to 2.0 / 2.1 to 5.0 / 5.1 to 10.0 / 10.1 to 20.02.1 to 5.0-5.1 to 10.0 / 10.1 to 20.010.1 to 20.02.1 to 5.02.1 to 5.02.1 to 5.02.1 to 5.02.1 to 5.0--5.1 to 10.0 / 10.1 to 20.010.1 to 20.05.1 to 10.0-2.1 to 5.02.1 to 5.05.1 to 10.0 / 10.1 to 20.0--5.1 to 10.0
                                                                                    Max. Transportable Mass (Vertical)(kg)0.5 ~ 158 ~ 128 ~ 128 ~ 128 ~ 1545---7 ~ 1038 ~ 127 ~ 118 ~ 15--1448 ~ 97 ~ 102 ~ 154-7 ~ 1114444 ~ 1133--8 ~ 1512.5 ~ 148-458 ~ 15--7 ~ 17
                                                                                    Drive MethodRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewSlide ScrewsSlide ScrewsSlide ScrewsRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsBeltsRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewRolled Ball ScrewBeltsBeltsRolled Ball Screw
                                                                                    GuideProvidedProvidedNot ProvidedNot ProvidedProvidedProvidedProvidedNot ProvidedNot ProvidedProvidedProvidedProvidedNot ProvidedProvidedProvidedProvidedProvidedNot Provided / Provided-Not ProvidedProvidedProvided-ProvidedNot ProvidedProvided--ProvidedProvidedProvidedProvidedProvidedProvidedProvided---Not ProvidedProvidedProvidedProvidedProvided
                                                                                    Lead(mm)5 ~ 3012 ~ 202.5 ~ 1612 ~ 206 ~ 12882 ~ 62 ~ 654 equivalent12 ~ 202412 ~ 202.5 ~ 166 ~ 1254 equivalent27-212 ~ 2012 ~ 205 ~ 121254 equivalent3 ~ 16-666 ~ 122424Equivalent to 48Equivalent to 486 ~ 12-10102126 ~ 1227Equivalent to 4810 ~ 12
                                                                                    Input Power Supply24 V DC-24 V DC--24 V DC24 V DC24 V DC24 V DC----24 V DC---24/48 V DC ~ Single-Phase, 200 to 240 V AC24 V DC--24 V DCSingle-Phase, 200 to 230 V AC-24 V DC24/48 V DC ~ Single-Phase, 200 to 240 V AC24 V DC24 V DC24 V DC--24 V DC24 V DC-24/48 V DC ~ Single-Phase, 200 to 230 V ACSingle-Phase, 200 to 230 V ACSingle-Phase, 200 to 230 V AC24 V DC24 V DC--24 V DC-
                                                                                    Position DetectionIncremental-IncrementalIncremental / AbsoluteIncremental / AbsoluteIncrementalIncremental--Incremental / Absolute--Incremental / AbsoluteIncrementalIncremental-Incremental / AbsoluteAbsoluteIncrementalAbsoluteIncremental / AbsoluteIncrementalIncremental / AbsoluteAbsoluteIncrementalAbsoluteIncrementalIncrementalIncrementalIncremental / AbsoluteAbsoluteIncrementalIncrementalIncremental / AbsoluteAbsoluteIncremental / AbsoluteIncremental / AbsoluteIncrementalIncrementalAbsoluteAbsoluteIncrementalAbsolute
                                                                                    I/O ModuleNPN / PNP / DeviceNet / Ethernet / EtherCAT / IO-Link / PROFINET-NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINET--NPN / PNP / Ethernet / Not Provided / EtherCAT / IO-Link / PROFINETNPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETPNP / Not ProvidedPNP / Not Provided----NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET---Not ProvidedNPN / PNP / CC-Link / DeviceNet--NPN / PNP / Ethernet / Not Provided / PROFINETNPN / PNP / CC-Link / DeviceNet-PNP / Ethernet / Not ProvidedNot ProvidedNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNet--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINETNPN / PNP / Ethernet / Not Provided / PROFINET-Not ProvidedNPN / PNP / CC-Link / DeviceNetNPN / PNP / CC-Link / DeviceNet-NPN / PNP / CC-Link / DeviceNet--NPN / PNP / Ethernet / Not Provided / EtherCAT / PROFINET-
                                                                                    Table Width W1(mm)39.4 ~ 74---506160--60-105--5060105-41--39.4 ~ 508060-36 ~ 875252-10510561108.750-808041-5010571.7 ~ 124.7-
                                                                                    BrakeNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / ProvidedNot Provided / Provided
                                                                                    Max. Thrust Force Range(N)101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200101 to 200
                                                                                    Max. Thrust Force(N)107.8 ~ 196131 ~ 197111 ~ 189131 ~ 197196180180117 ~ 196117 ~ 196147131 ~ 197147131 ~ 197111 ~ 189196147196125 ~ 200150131 ~ 157131 ~ 197107.8 ~ 294141147122 ~ 189125 ~ 200120120150 ~ 300147147107.8196196125 ~ 200169169150150196196196131 ~ 308
                                                                                    Noise FiltersNot Provided / ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided-Not ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot ProvidedNot ProvidedNot Provided---Not ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot ProvidedNot Provided / ProvidedNot Provided / Provided--Not ProvidedNot ProvidedNot ProvidedNot Provided
                                                                                    Table Length L1(mm)72 ~ 170---102143 ~ 285133.5 ~ 316.5--122-160--102122160-58--72 ~ 10278122-65 ~ 809090-1601607810010272 ~ 1087815458-102160100-
                                                                                    Usage EnvironmentStandardDust ResistantStandardStandardStandardStandard / Dust ResistantStandard / Dust ResistantStandardStandardStandardStandardStandardDust ResistantStandardStandardStandardStandardStandardStandardDust ResistantStandardStandardStandardStandardStandard / Dust ResistantStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandardStandard
                                                                                    Positioning Repeatability(µm)±15 ~ ±20±10 ~ ±20±20±20±10 ~ ±20±50±50--±60±10 ~ ±20±10 ~ ±20±20±20±10 ~ ±20±60±40-±20±10 ~ ±20±10 ~ ±20±15 ~ ±20±20±60±20-±20±20±20±10 ~ ±20±20±80±80±20-±10±10±20±20±10 ~ ±20±40±80±20
                                                                                    Maximum Velocity(mm/sec)1,200 ~ 11001,000 ~ 1000125 ~ 5001,000 ~ 10001,500 ~ 90015020033 ~ 10033 ~ 10020001,000 ~ 900410 ~ 18001,000 ~ 900125 ~ 500270 ~ 90020002000300 ~ 6001001,200 ~ 9001,000 ~ 900250 ~ 5007202000100 ~ 400270 ~ 800300300250 ~ 500410 ~ 180018001,0001,000360 ~ 900300 ~ 800600600100500360 ~ 900200020001,000 ~ 900

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